A large current scanning electron microscope with MEMS-based multi-beam optics

Ichimura, Takashi; Ren, Yan; Kruit, P.

doi:10.1016/j.mee.2013.07.008

Cited by 10 publications

(4 citation statements)

References 1 publication

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“…In previous studies [15][16][17][18][19][20][21][27][28][29][30][31][32][33][34][35][36][37][38][39][40][41], the focus was on developing a specific handler for a specific domain for ATE parallel testing. However, in a situation of existing different domains such as electrostatic, piezoelectric, and piezoresistive, a methodology capable of handling all the domains are required.…”

Section: Methodsmentioning

confidence: 99%

“…Interferometer [24,25] Tilt/deflection of sample AFM [26] Topographic of surface Pull-in [27,28] Pull-in voltage XRD [29] indentation imprint µ strain gauge [30] Strain/stress Acoustic emission [31] Device in package testing…”

Section: Destructive Non-destructivementioning

confidence: 99%

“…The last decade has witnessed an admirable surge for the introduction of diverse general characterizing and testing methods for MEMS devices, some of which are shown in Table 1 [24][25][26][27][28][29][30][31][32][33][34][35][36][37][38][39][40][41]. These methods are categorized into two main groups: destructive and non-destructive testing approaches.…”

Section: Introductionmentioning

confidence: 99%

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A New Non-Invasive Air-Based Actuator for Characterizing and Testing MEMS Devices

2020

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This research explores a new ATE (Automatic Testing Equipment) method for Micro Electro Mechanical Systems (MEMS) devices. In this method, microscale aerodynamic drag force is generated on a movable part of a MEMS sensor from a micronozzle hole located a specific distance above the chip that will result in a measurable change in output. This approach has the potential to be generalized for the characterization of every MEMS device in mass production lines to test the functionality of devices rapidly and characterize important mechanical properties. The most important testing properties include the simultaneous application of controllable and non-invasive manipulative force, a single handler for multi-sensor, and non-contact characterization, which are relatively difficult to find with other contemporary approaches. Here we propose a custom-made sensing platform consisting of a microcantilever array interconnected to a data acquisition device to read the capacitive effects of each cantilever’s deflection caused by air drag force. This platform allows us to empirically prove the functionality and applicability of the proposed characterization method using airflow force stimuli. The results, stimulatingly, exhibited that air force from a hole of 5 µm radii located 25 µm above a 200 × 200 µm2 surface could be focused on a circular spot with radii of approximately 5 µm with surface sweep accuracy of <8 µm. This micro-size airflow jet can be specifically designed to apply airflow force on the MEMS movable component surface. Furthermore, it was shown that the generated air force range could be controlled from 20 nN to 60 nN, approximately, with a linear dependency on airflow ranging from 5 m/s to 20 m/s, which is from a 5 µm radius microhole air jet placed 400 µm above the chip. In this case-study chip, for a microcantilever with a length of 400 µm, the capacitance curve increased linearly from 28.2 pF to 30.5 pF with airflow variation from 5 m/s to 21 m/s from a hole. The resultant curve is representative of a standard curve for testing of the further similar die. Based on these results, this paper paves the way towards the development of a new non-contact, non-invasive, easy-to-operate, reliable, and relatively cheap air-based method for characterizing and testing MEMS sensors.

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Section: Methodsmentioning

confidence: 99%

Section: Destructive Non-destructivementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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A New Non-Invasive Air-Based Actuator for Characterizing and Testing MEMS Devices

2020

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“…[10][11][12][13] More specifically, detecting signals separately is an inherent challenge in regard to multiple-beam SEM. In this study, this challenge was addressed by designing an electron optical system with an additional part for controlling multiple secondary-electron signals independently of beam illumination.…”

Section: Introductionmentioning

confidence: 99%

Optical system for a multiple-beam scanning electron microscope

Enyama

Sakakibara

Tanimoto

et al. 2014

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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A novel optical system for a multiple-beam scanning electron microscope (SEM) is proposed. In the case of multiple-beam SEM, multiple secondary-electron beams passing through the column are inherently blurred because of the large energy spread and broad angular distribution of secondary electrons. To avoid cross-talk between the multiple secondary-electron beams, the optical system is designed such that it is divided into two independent parts: one for primary-beam illumination and one for secondary-electron detection. As the key components for the secondary-electron detection, a scan-cancelling deflector, and accelerating electric field were applied. To demonstrate the proposed optical system, a prototype column with four beams was developed. This column enables four SEM images to be separately but simultaneously acquired with more than 99% of the generated secondary electrons. This result demonstrates that high-speed imaging with the proposed multiple-beam SEM is possible in the near future.

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