A large transistor-based sensor array chip for direct extracellular imaging

Milgrew, M.J.; Riehle, Mathis O.; Cumming, David R. S.

doi:10.1016/j.snb.2005.01.020

Cited by 59 publications

(37 citation statements)

References 9 publications

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“…However, none of them produced de novo DNA sequence, addressed the issue of delivering template DNA to the sensors, or scaled to large arrays. In addition, previous efforts in ISFETs were limited in the number of sensors per array, the yield of working independent sensors and readout speed 35,36 , and encountered difficulty in exposing the sensors to fluids while protecting the electronics 37 .Here, we overcome previous limitations with electronic detection and enable the production of chips with a large number of fast, uniform, working sensors. Our focus has been on the development of these ion chips, as well as the biochemical methods, supporting instrumentation and software needed to enable de novo DNA sequencing for applications requiring millions to billions of bases ( Supplementary Fig.…”

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An integrated semiconductor device enabling non-optical genome sequencing

Rothberg¹,

Hinz²,

Rearick³

et al. 2011

Nature

1,893

1,157

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The seminal importance of DNA sequencing to the life sciences, biotechnology and medicine has driven the search for more scalable and lower-cost solutions. Here we describe a DNA sequencing technology in which scalable, low-cost semiconductor manufacturing techniques are used to make an integrated circuit able to directly perform non-optical DNA sequencing of genomes. Sequence data are obtained by directly sensing the ions produced by template-directed DNA polymerase synthesis using all-natural nucleotides on this massively parallel semiconductor-sensing device or ion chip. The ion chip contains ion-sensitive, field-effect transistor-based sensors in perfect register with 1.2 million wells, which provide confinement and allow parallel, simultaneous detection of independent sequencing reactions. Use of the most widely used technology for constructing integrated circuits, the complementary metal-oxide semiconductor (CMOS) process, allows for low-cost, large-scale production and scaling of the device to higher densities and larger array sizes. We show the performance of the system by sequencing three bacterial genomes, its robustness and scalability by producing ion chips with up to 10 times as many sensors and sequencing a human genome.DNA sequencing and, more recently, massively parallel DNA sequencing 1-4 has had a profound impact on research and medicine. The reductions in cost and time for generating DNA sequence have resulted in a range of new sequencing applications in cancer 5,6 , human genetics 7 , infectious diseases 8 and the study of personal genomes 9-11 , as well as in fields as diverse as ecology 12,13 and the study of ancient DNA 14,15 . Although de novo sequencing costs have dropped substantially, there is a desire to continue to drop the cost of sequencing at an exponential rate consistent with the semiconductor industry's Moore's Law 16 as well as to provide lower cost, faster and more portable devices. This has been operationalized by the desire to reach the $1,000 genome 17 .To date, DNA sequencing has been limited by its requirement for imaging technology, electromagnetic intermediates (either X-rays 18 , or light 19 ) and specialized nucleotides or other reagents 20 . To overcome these limitations and further democratize the practice of sequencing, a paradigm shift based on non-optical sequencing on newly developed integrated circuits was pursued. Owing to its scalability and its low power requirement, CMOS processes are dominant in modern integrated circuit manufacturing 21 . The ubiquitous nature of computers, digital cameras and mobile phones has been made possible by the low-cost production of integrated circuits in CMOS.Leveraging advances in the imaging field-which has produced large, fast arrays for photonic imaging 22 -we sought a suitable electronic sensor for the construction of an integrated circuit to detect the hydrogen ions that would be released by DNA polymerase 23 during sequencing by synthesis, as opposed to a sensor designed for the detection of photons. Although a variety ...

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confidence: 99%

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confidence: 99%

An integrated semiconductor device enabling non-optical genome sequencing

Rothberg¹,

Hinz²,

Rearick³

et al. 2011

Nature

1,893

1,157

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“…Thanks to these advantages, IS-FETs have been used in many applications. (16)(17)(18)(19) With (21,22) In recent years, highly integrated IS-FET arrays fabricated with CMOS technology have been reported. Nemeth et al reported a movie recording of pH change using an array of 64 × 64 ISFETs fabricated with the 0.35 μm process rule.…”

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confidence: 99%

Development and Bio-imaging Applications of a Chemical Imaging Sensor

2016

Sensors and Materials

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A chemical imaging sensor is a field-effect-based semiconductor sensor, capable of label-free imaging of ion distributions in a solution. The sensor has attracted much interest owing to its simple structure and diverse fields of application of bioimaging. In this article, the principle and development of the chemical imaging sensor are summarized, compared with those of other labelfree imaging sensors. Bio-imaging applications of the chemical imaging sensor to ion diffusion, enzymatic reaction, and metabolic activities of microorganisms are also reviewed.

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“…Some array devices such as the ion sensor field-effective transistor (ISFET), fabricated in MOS circuit process, have been developed. 4 Another new type of ion sensor fabricated by complimentary MOS (CMOS) processes that incorporated a pH sensor using charge-coupled device (CCD) technology had been developed by Sawada et al 5 The chemical sensing area for the hydrogen ion included a layered Si3N4 film (Si3N4/SiO2/p-type Si (p-Si) substrate) similar to an ISFET. However, the signal treatment of chemical potential change was different from that of a typical ISFET.…”

Section: Introductionmentioning

confidence: 99%