A semi-digital PLL utilizing a hybrid DCO is presented. A mixed-mode loop control with an analog proportional path and a digital integration path provides linear phase tracking, leakage-insensitive loop filtering, and technology scalability. With the absence of the linear TDC, the semi-digital PLL with the hybrid DCO can relax design difficulties such as achieving low power or requiring an advanced CMOS technology. Also, the hybrid finite-impulse response (FIR) filtering method is employed to reduce the DCO quantization noise without causing latency. The prototype PLL implemented in 0.18μm has the active area of 0.6mm 2 where only 0.01mm 2 is occupied by the analog loop filter.I.