A lateral field excited ZnO film bulk acoustic wave sensor working in viscous environments

Chen, Da; Wang, Jingjing; Xu, Yan; Li, Dehua; Zhang, Liuyin; Liu, Weihui

doi:10.1088/0960-1317/23/9/095032

Cited by 12 publications

(6 citation statements)

References 20 publications

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“…of 1.7% and quality factors of 312 in air and 192 in water [266]. Recent mode has a resonant frequency near 1.44 GHz and a Q-factor up to 360 in air and 310 in water, which reached the mass sensitivity of 670 Hz•cm 2 •ng and the high mass resolution of 0.06 ng•cm [267]. Direct comparison of the gravimetric responsivities of ZnO-based FBARs and solidly mounted resonators (SMRs) indicated that the FBARs' mass responsivity was about 20% frequency at about 2 GHz, which was mainly due to the acoustic load at one…”

Section: Film Bulk Acoustic Resonatormentioning

confidence: 99%

Zno Thin Films and Nanostructures for Acoustic Wave-Based Microfluidic and Sensing Applications

Peng¹,

Luo²,

Fu³

2018

Functional Materials and Electronics

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Progress in ZnO thin films and nanostructures for the acoustic wave microfluidic and sensing applications are reviewed in this chapter. ZnO thin films with good piezoelectric properties possess large electromechanical coupling coefficients and can be fabricated for the surface acoustic wave (SAW) and film-bulk acoustic resonator (FBAR) devices with a good acoustic performance. The SAWs can be excited to mix, stream, pump, eject, and atomize the liquid, and precision sensing can be performed using SAWs and FBARs. Therefore, the ZnO SAW devices are attractive to be integrated into a labon-chip system where the SAWs can transport bio-fluids to the desired area, mix the extracted DNA or proteins, and detect the changes of the signals using SAWs or FBARs. The ZnO SAW and FBAR devices in combination with different sensing layers could also be used to successfully detect gas, UV light, and biochemicals with remarkable sensitivities. 5.1 INTRODUCTION Zinc oxide (ZnO) is a binary compound via a covalent bonding between the transition-metal zinc atom and oxygen atom. ZnO thin films and nanostructures are multifunctional materials, which have attracted much attention from as early as 1930s until today due to various fundamental electronic, years, the development of new growth technologies of ZnO thin films and nanostructures and their new applications has renewed lots of interest on investigation of their growth mechanism, band structures, excitons, and deep centers in luminescence, nonlinear optics, and UV lasing [8,9]. With in-depth understanding of the semiconducting, optical, electronic, piezoelectric, and pyroelectric properties, ZnO has now been widely applied for microfluidics, These immense applications also have boosted the extensive researches on the fundamentals and growth techniques of the ZnO-based materials. typically at micron and submicron dimensions in a miniaturized system and the corresponding technologies for such systems. This multidisciplinary technology is comprehensively based on physics, nanotechnology, biotech-ZnO Thin Films and Nanostructures for Acoustic 197 the developments of the inkjet print-heads, DNA chips, and lab-on-a-chip is conveniently handled through generating, transporting, separating, consumption, high-throughput, compactness, high sensitivity, fast response, at microscale has been supported with the urgent needs from healthcare, medical research, life science, drug-development sectors. However, the and phenomena become dominant at a microscale level, such as capillary forces, surface roughness and undesired chemical interactions. These may be

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Section: Film Bulk Acoustic Resonatormentioning

confidence: 99%

Zno Thin Films and Nanostructures for Acoustic Wave-Based Microfluidic and Sensing Applications

Peng¹,

Luo²,

Fu³

2018

Functional Materials and Electronics

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“…The serum made a more obvious damping effect on the resonance, which accords with the fact that the serum has a higher viscoelastic constant than that of water. The Modified Butterworth-Van Dyke (MBVD) equivalent circuit model [38][39][40] was used to describe the electric characterization of the resonator. Table 1 summarizes the circuit parameters obtained by fitting the impedance curves measured in different mediums.…”

Section: Resonant Characteristics In Air and Liquidsmentioning

confidence: 99%

Detection of cardiac biomarkers in serum using a micro-electromechanical film electroacoustic resonator

Peng

Song

Niu

et al. 2020

J. Micromech. Microeng.

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Rapid, portable, and sensitive biosensors for the detection of cardiac biomarkers are important for early diagnosis of cardiovascular diseases. We demonstrate a micro-electromechanical film electroacoustic resonator for heart-type fatty acid-binding protein assays. This device combines an immunologic sensitive element with the resonator working in biological liquids. Based on the mass-sensitive mechanism, the immune reaction between the target antigens and antibodies was detected by monitoring the frequency change in real-time and the concentration of heart-type fatty acid-binding protein in serum was determined. A linear response in 0.02–10 ng ml−1 and a low detection limit of 0.014 ng ml−1 were achieved. Serum samples were collected from patients and used without any additional pre-treatment. The protein concentrations measured by the proposed device showed good linear correlation and consistency compared with standard laboratory methods. The results indicate that the proposed device is able to be a feasible tool for sensitive, rapid, and miniaturized point-of-care analytical systems.

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“…FBAR features a 1-2 micron-thick piezoelectric thin film, such as AlN (Wingqvist 2010), ZnO (Flewitt et al 2015), Pb(Zr,Ti)O 3 (Zinck et al 2005), Ba x Sr 1-x TiO 3 (Lee and Mortazawi 2016), and allows a significantly higher frequency and sensitivity than those of QCMs (Voiculescu and Nordin 2012). As an electroacoustic device, the resonant states of FBAR can be affected by the damping of adjacent medium when the device works in the liquid environment, which makes it feasible to monitor the viscoelasticity changes during the biological reaction (Chen et al 2013;Xu et al 2012). The size of the FBAR device is within 1 mm 2 , which remarkably reduces the form factor and -5 -manufacturing cost by the batch fabrication based on micro-electromechanical system (MEMS) technology.…”

Section: Introductionmentioning

confidence: 99%

Micro-electromechanical film bulk acoustic sensor for plasma and whole blood coagulation monitoring

Chen

Song

et al. 2017

Biosensors and Bioelectronics

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Monitoring blood coagulation is an important issue in the surgeries and the treatment of cardiovascular diseases. In this work, we reported a novel strategy for the blood coagulation monitoring based on a micro-electromechanical film bulk acoustic resonator. The resonator was excited by a lateral electric field and operated under the shear mode with a frequency of 1.9GHz. According to the apparent step-ladder curves of the frequency response to the change of blood viscoelasticity, the coagulation time (prothrombin time) and the coagulation kinetics were measured with the sample consumption of only 1μl. The procoagulant activity of thromboplastin and the anticoagulant effect of heparin on the blood coagulation process were illustrated exemplarily. The measured prothrombin times showed a good linear correlation with R=0.99969 and a consistency with the coefficient of variation less than 5% compared with the commercial coagulometer. The proposed film bulk acoustic sensor, which has the advantages of small size, light weight, low cost, simple operation and little sample consumption, is a promising device for miniaturized, online and automated analytical system for routine diagnostics of hemostatic status and personal health monitoring.

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A lateral field excited ZnO film bulk acoustic wave sensor working in viscous environments

Cited by 12 publications

References 20 publications

Zno Thin Films and Nanostructures for Acoustic Wave-Based Microfluidic and Sensing Applications

Zno Thin Films and Nanostructures for Acoustic Wave-Based Microfluidic and Sensing Applications

Detection of cardiac biomarkers in serum using a micro-electromechanical film electroacoustic resonator

Micro-electromechanical film bulk acoustic sensor for plasma and whole blood coagulation monitoring

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