A Linear Scheme for the Displacement Analysis of Micropositioning Stages with Flexure Hinges

Her, Innchyn; Chang, Jia‐Lin

doi:10.1115/1.2919449

Cited by 72 publications

(31 citation statements)

References 0 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Therefore, flexure hinges are widely used in translation micropositioning stages, scanning tunneling microscopes, high-precision cameras, robotic microdisplacement mechanisms, and especially in micro-electromechanical systems (MEMSs). [3][4][5] In 1965, Paros and Weisbord 6 first proposed design equations for the circular flexure hinges, both exact and simplified, which are derived for calculating the compliances of single-axis and two-axes circular-cutout constant cross section flexure hinges. Then, right circular flexure hinges were extensively employed in compliant mechanisms.…”

Section: Introductionmentioning

confidence: 99%

Design and analysis of a high-accuracy flexure hinge

Liu

Zhang

Fatikow

2016

Review of Scientific Instruments

View full text Add to dashboard Cite

This paper designs and analyzes a new kind of flexure hinge obtained by using a topology optimization approach, namely, a quasi-V-shaped flexure hinge (QVFH). Flexure hinges are formed by three segments: the left and right segments with convex shapes and the middle segment with straight line. According to the results of topology optimization, the curve equations of profiles of the flexure hinges are developed by numerical fitting. The in-plane dimensionless compliance equations of the flexure hinges are derived based on Castigliano's second theorem. The accuracy of rotation, which is denoted by the compliance of the center of rotation that deviates from the midpoint, is derived. The equations for evaluating the maximum stresses are also provided. These dimensionless equations are verified by finite element analysis and experimentation. The analytical results are within 8% uncertainty compared to the finite element analysis results and within 9% uncertainty compared to the experimental measurement data. Compared with the filleted V-shaped flexure hinge, the QVFH has a higher accuracy of rotation and better ability of preserving the center of rotation position but smaller compliance. Published by AIP Publishing. [http://dx

show abstract

Section: Introductionmentioning

confidence: 99%

Design and analysis of a high-accuracy flexure hinge

Liu

Zhang

Fatikow

2016

Review of Scientific Instruments

View full text Add to dashboard Cite

show abstract

“…As a result, the stage design specifications should take into account the needs of the targeted applications. A stage supported by flexure components has been widely used in precision engineering applications [11][12][13][14][15][16][17][18][19]. The design exploits the elastic deformation to provide essential structure stiffness and the overall performance is a compromise among desired specifications, static and dynamic responses, and controllability considerations.…”

Section: Conceptual Layoutmentioning

confidence: 99%

Design and vibration control of a notch-based compliant stage for display panel inspection applications

Wang

Lee

Chen

et al. 2014

Journal of Sound and Vibration

View full text Add to dashboard Cite

“…Improper initial values chosen will increase the calculation time. Her and Chang have developed a linear scheme for the displacement analysis of the micropositioning stages 8 . All the geometrically constrained equations are linear and can be solved directly.…”

Section: Previous Workmentioning

confidence: 99%

“…A numerical iteration technique is normally employed to solve these equations. This iteration process will increase computational time 8 and hinder controller designs. This paper presents a method of deriving a simple, linear forward kinematic model of the particular 3RRR parallel micromanipulation device which effectively represents the real-system, and can also be easily calculated in real-time for the implementation of control.…”

Section: Introductionmentioning

confidence: 99%

Loop closure theory in deriving linear and simple kinematic model for a 3-DOF parallel micromanipulator

Yong

Handley

2004

SPIE Proceedings

View full text Add to dashboard Cite

Various types of micro-motion devices have been developed in the past decade for applications including the manipulation of cells in micro-surgery and the assembly of micro-chips in micro-assembly industries. Most of the micro-motion devices are designed using the compliant mechanism concept, where the devices gain their motions through deflections. In addition, closed-loop parallel structures are normally adopted due to better stiffness and accuracy compared to the serial structures. However, the forward kinematics of parallel structures are complex and non-linear; to solve these equations, a numerical iteration technique has to be employed. This iteration process will increase computational time, which is highly undesirable. This paper presents a method of deriving a simple, linear and yet effective kinematic model based on the loop closure theory and the concept of the pseudo-rigid-body model. This method is illustrated with a 3 DOF (degree-of-freedom) micro-motion device. The results of this linear method are compared with a full kinematic model for the same micro-motion system. It is proved that the derived kinematic model in this paper is accurate and the methodology proposed is effective. The static model of the micro-motion device will also be presented. The uncoupling property of the micro-motion systems, based on the static model, will be briefly discussed.

show abstract

A Linear Scheme for the Displacement Analysis of Micropositioning Stages with Flexure Hinges

Cited by 72 publications

References 0 publications

Design and analysis of a high-accuracy flexure hinge

Design and analysis of a high-accuracy flexure hinge

Design and vibration control of a notch-based compliant stage for display panel inspection applications

Loop closure theory in deriving linear and simple kinematic model for a 3-DOF parallel micromanipulator

Contact Info

Product

Resources

About