Design and vibration control of a notch-based compliant stage for display panel inspection applications

Wang, Wei Chih; Lee, Jer Wei; Chen, Kuo-Shen; Liu, Yun Hui

doi:10.1016/j.jsv.2014.01.012

Cited by 12 publications

(9 citation statements)

References 20 publications

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“…Determine the force actuators should apply by this relation to satisfy the input positioning command of y, θ x and θ z to the stage. Eq (2) represents that the action of any actuator will generate not only one degree of freedom motion, it's a couple motion design.…”

Section: (1)mentioning

confidence: 99%

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Analysis and Design of a Novel 3-DOF Translational and Rotational Elastomeric Bearing Positioning Stage

Chen¹,

Chen²,

Liu³

2017

The Proceedings of the 5th International Conference on Industrial Application Engineering 2017

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Positioning stage plays an important role in precision mechanical system. Fast steering mirror mainly comprised of a rotational positioning stage and it has been widely used in laser manufacturing related applications. In this article, a novel 3-DoF translational and rotational positioning stage is proposed and designed. It utilizes elastomeric bearing for providing stiffness and has the advantages of small size and structurally simple. This stage is driven by three voice coil motors and measured by three capacitive displacement sensors. In order to establish the system dynamics, the rubber stiffness is also characterized in different loading manners by both simulation and experiment using a biaxial material testing system and a high strain compression testing system. The characterized hyperelastic behavior is modelled via Arruda-Boyce model, for subsequent finite element simulation. Based on these stiffness characterization and additional vibrational analyses, a 3-DOF stage dynamics model is developed and is validated using FEM. Preliminary stage realization and maneuver with the associated actuators and sensors have been demonstrated in this article. Furthermore, controller design and positioning experiment of stage will go on in the future.

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Section: (1)mentioning

confidence: 99%

“…Traditionally, such stages are usually designed and realized based on compliant mechanisms [2]. However, compliant stages usually have complicated shapes and relatively large size for specific mechanical designs.…”

Section: Introductionmentioning

confidence: 99%

Analysis and Design of a Novel 3-DOF Translational and Rotational Elastomeric Bearing Positioning Stage

Chen¹,

Chen²,

Liu³

2017

The Proceedings of the 5th International Conference on Industrial Application Engineering 2017

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“…Notice that the selection of sensor and actuator in this work is not unique but is based on the compromise between performance, cost, and system integration factors. For example, it is also possible to use a piezoelectric (PZT) actuator [6,16] or a magnetostrictive actuator [16] in this design. However, in comparison with voice coil motors at the same characteristic length, the stroke of PZT actuators is usually much less, and the magnetostrictive actuators are much heavier-neither of them can satisfy the design goal.…”

Section: Approachmentioning

confidence: 99%

“…For example, Chang and Du [5] designed a micropositioning stage with a stroke of 100 µm and a resolution of 0.04 µm. Wang and Lee [6] developed a single-degree-of-freedom PZT compliant positioning stage for automatic optical inspection (AOI) applications. It can provide a maximum stroke of 101 µm with a 53.8 nm steady state error and a bandwidth of 29 Hz.…”

Section: Introductionmentioning

confidence: 99%

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Analysis, Design, and Control of a Novel Elastomeric Bearing Positioning Stage

Teng

Chen

2016

Inventions

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As products are required with higher precision, vibration control becomes more important for precision machining and inspection. A stage with both fast positioning and relative vibration eliminated can improve product quality. Elastomeric bearings are widely used in the seismic engineering and precision machining fields. By utilizing their stiffness anisotropy, miniaturized bearings can be made of rubbers and have the same function as much larger compliant mechanism-based designs. This provides possible advantages in precision positioning. In this paper, to model the system dynamics of the stage, the mechanical properties of elastomeric bearings are determined through essential material tests of the load cells in this system. The results show that the bearing stiffness is both frequency-and time-dependent. A single-degree-of-freedom precision stage containing four elastomeric bearings is then designed and realized. The stiffness of the elastomeric bearings is modeled as a generalized Maxwell model by system dynamics testing of the controller design. A closed-loop control system comprising an AVM40-20 voice coil motor, an ASP-10-CTR capacitance probe, and an Integral Sliding Mode controller is proposed for the precision stage. Signal processing for the entire system is performed under an NI cRIO-9014 LabVIEW field-programmable gate array real-time controller. In comparison with a previous compliant mechanism-based design, the stage size is reduced from 130 × 40 × 15 mm 3 to 30 × 33 × 33 mm 3 , the positioning stroke is increased from 101 to 139 µm, and the bandwidth is increased from 29 to 350 Hz.

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