A low-cost micromechanical accelerometer with integrated solid-state sensor

Haronian, D.

doi:10.1016/s0924-4247(99)00239-3

Cited by 13 publications

(7 citation statements)

References 13 publications

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“…At the right-hand of point M 6 , the micro-cantilever will rebound to the initial position. Although the elastic force equals to the adhesion force at point M 4 For such MEMS devices as the micro accelerometers and the micro valves, in order to make the micro-cantilever rebounded to the initial position, the stiffness of the micro-cantilever should be high, and the elastic force should be greater than the adhesion force at point M 5 . Other MEMS devices, such as the micro acceleration switches, in order to reduce the contact resistance and response time, the stiffness of the micro-cantilever should be low and the elastic force should be smaller than the adhesion force at point M 5 .…”

Section: Discussion On "Snap Back"mentioning

confidence: 99%

“…Typically, MEMS can be classified as sensors and actuators. Among the micro-devices, such as MEMS optical switches, RF-MEMS switches, micro accelerometers, micro pumps, micro valves and so forth, micro-cantilevers play an important role [1][2][3][4][5][6]. With the reduction of material dimensions and manufacture dimensions, the dimension effect has been received more and more attention to the MEMS performance and reliability.…”

Section: Introductionmentioning

confidence: 99%

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A Static Analysis of Snap Back in the Cantilever with Mems Adhesion

Tian

Jia²,

Gui-ming³

et al. 2006

Multidiscipline Modeling in Materials and Structures

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The "Snap back" problem of the micro-cantilever remains one of the dominant failure mechanisms in the Micro Electro-mechanical System (MEMS). By analyzing the Hamaker micro continuum medium and solid physics principle, the consistency model of Wigner-Seitz (W-S) continuum medium is presented. The gap revision coefficients of the body with the face-centered cubic structure are derived, which include the attractive force and the repulsive one. The adhesion model of the 500 m 1 m silicon micro-cantilever coated by Au is established. The micro-cantilever static relationship between the elastic force and the adhesion force is discussed. The reason of the microcantilever "snap back" problem, an instable balanced point, is discovered. Increasing the rigidity of the micro-cantilever, a method to avoid the micro-cantilever "snap back" to happen, is put forward, which improves MEMS structure design and enhances MEMS reliability.

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Section: Discussion On "Snap Back"mentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

A Static Analysis of Snap Back in the Cantilever with Mems Adhesion

Tian

Jia²,

Gui-ming³

et al. 2006

Multidiscipline Modeling in Materials and Structures

View full text Add to dashboard Cite

show abstract

“…When the geometrical dimension of the material is reduced to a critical dimension in at least a one-dimensional direction, various physical mechanisms of the materials will “feel” the effect of the surface and interface [15]. Previous research [15,16,17,18,19] has shown that macroscopic bulk materials and corresponding nano-film materials usually exhibit different properties. Ghidelli et al reported extrinsic mechanical size effects in thin Zr–Ni metallic glass films [20] and the yield stress increased with decreasing specimen size up to the ideal yield strength [21].…”

Section: Introductionmentioning

confidence: 99%

Discrepancies in the Microstructures of Annealed Cu–Zr Bulk Alloy and Cu–Zr Alloy Films

et al. 2019

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Copper–zirconium bulk alloy and Cu–Zr alloy films are prepared by vacuum smelting and magnetron sputtering, respectively, and subsequently annealing is conducted. Results show that Cu–Zr bulk alloy and alloy films exhibit significantly different microstructure evolution behaviors after annealing due to different microstructures and residual stress states. CuxZr alloy compounds disperse at the grain boundary of Cu grains in as-cast and annealed Cu–Zr bulk alloys. However, unlike bulk alloys, a large number of polyhedral Cu particles are formed on the Cu–Zr thin films’ surface upon thermal annealing. Kinetically, the residual compressive stress in the Cu–Zr films promotes the formation of Cu particles. The influencing factors and the path for mass transport in the formation of the particles are discussed. The large-specific surface area particles/film composite structure has potential applications in Surface-Enhanced Raman Scattering, catalysis, and other fields.

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“…A lot of successful fabrication and improvement on different types / operating principles of accelerometers have been reported. [12][13][14][15][16][17][18][19][20][21][22][23][24][25] Accelerometers would not be discussed further in this review since the focus of the thesis was on gyroscope.…”

Section: Conventional Accelerometer Consists Of a Proof Mass Suspendementioning

confidence: 99%

Processing and characterization of high permeability thin-film for micro rotating gyroscope development

Tjeung¹

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Current advancement in micro motor area is not encouraging. The devices generally suffer from limited lifetime issue. For this reason, most micro gyroscopes are designed to be of a vibrating type. Unfortunately, these designs have a major problem called "drift". Drift arises due to intrinsic instability, which is related to number of mechanical coupling associated with its design. Reliable operation of these gyros would require severe stability of all its parameters. A micro levitation gyroscope design would be the preferred solution to address these problems. This design had two advantages in both addressing the lifetime and drift problem. Since there is no mechanical contact, common micro motor problem of wear and limited lifetime could be solved. This design also will remove drift problem suffered by micro vibrating gyroscopes due to its non-contact design. In spite of these benefits, the development of such a design is still in its infancy. Many limitations associated with this design prevent it from commercialization. The main problem relating to this design is its high power consumption. The micro-rotating gyroscope utilizes electromagnetic principle for its operation. The device draws large amount of current in order to produce a levitation force to act as magnetic bearing. This problem can be addressed by adding an extra magnetic material as a backing plane to enhance the magnetic flux produce and hence the force. This enhancement would reduce the high current consumption currently suffered by the device.

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A low-cost micromechanical accelerometer with integrated solid-state sensor

Cited by 13 publications

References 13 publications

A Static Analysis of Snap Back in the Cantilever with Mems Adhesion

A Static Analysis of Snap Back in the Cantilever with Mems Adhesion

Discrepancies in the Microstructures of Annealed Cu–Zr Bulk Alloy and Cu–Zr Alloy Films

Processing and characterization of high permeability thin-film for micro rotating gyroscope development

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