2021
DOI: 10.1016/j.sna.2021.112567
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A low frequency driven piezoelectric pump with flexible valve

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Cited by 11 publications
(4 citation statements)
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“…It has received extensive attention in the aspects of on-chip laboratory, chemical analysis, drug injection, inkjet printing, engine oil supply, electronic chip cooling process, and precision hydraulic work table [3][4][5][6][7][8][9].…”
Section: Introductionmentioning
confidence: 99%
“…It has received extensive attention in the aspects of on-chip laboratory, chemical analysis, drug injection, inkjet printing, engine oil supply, electronic chip cooling process, and precision hydraulic work table [3][4][5][6][7][8][9].…”
Section: Introductionmentioning
confidence: 99%
“…However, the problems of high processing difficulty and the bulky shape of the two forms are obvious. Other forms, such as the flexible film valve [ 29 ], cymbal-shaped slotted valve [ 30 ], and venous imitation valve, have also been presented [ 31 , 32 ]. Moreover, the poor precision of the valve body and the insufficient cut-off are their common shortcomings.…”
Section: Introductionmentioning
confidence: 99%
“…Generally, the fluid is driven by the piezoelectric pump through the piezoelectric vibrator and special structures. It has the advantages of a simple structure [ 15 ], easy miniaturization [ 16 ], and no electromagnetic interference [ 17 ], leading to widespread use in microfluidic applications [ 5 , 6 , 7 ], medical equipment [ 18 , 19 , 20 ], fuel cells [ 21 , 22 , 23 ], and other fields. In terms of structure, piezoelectric pumps can be divided into valve-based piezoelectric pumps and valve-less piezoelectric pump [ 13 ].…”
Section: Introductionmentioning
confidence: 99%
“…When the frequency reaches a certain critical value, the piezoelectric pump has a dynamic balance, and the pump flow is reduced to zero, resulting in the phenomenon named known as “pump lagging of valve”. Valve-based piezoelectric pumps include: flexible-valve piezoelectric pumps [ 16 ], bionic-valve piezoelectric pumps [ 24 ], self-priming-valve piezoelectric pumps [ 25 ], etc. A special flow channel is employed in valve-less piezoelectric pumps to replace the valve structure in valve piezoelectric pumps, in which the pump-lagging of the valve is effectively avoided.…”
Section: Introductionmentioning
confidence: 99%