A Low-g MEMS Inertial Switch Based on Direct Contact Sensing Method

Xiong, Zhuang; Wang, Chao; Zhang, Fengtian; Xie, Jin; Shen, Zhaoyang; Tang, Bin

doi:10.1109/tcpmt.2019.2926332

Cited by 5 publications

(3 citation statements)

References 20 publications

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“…Moreover, to further decrease the threshold, they redesigned the structure of the spring–mass system [ 59 ], as shown in Figure 5 c. By reducing the spring thickness and increasing the spring length, the design obtained lower stiffness and the threshold value was 5 g. Furthermore, they introduced the conceptual design of a new MEMS inertial microswitch, which adopted the method of direct contact sensing to eliminate the bouncing effect when the electrodes were in contact. The measured threshold was approximately 11.8 g [ 60 ]. Field et al [ 61 ] studied a low-g switch with a threshold value of 25 g. The fabrication was based on a silicon-on-insulator (SOI) wafer, and the sensing direction was along the thickness of the wafer.…”

Section: Intermittent Inertial Switchesmentioning

confidence: 99%

Research Progress of MEMS Inertial Switches

Liu

Niu

et al. 2022

Micromachines

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As a typical type of MEMS acceleration sensor, the inertial switch can alter its on-off state while the environmental accelerations satisfy threshold value. An exhaustive summary of the design concept, performance aspects, and fabrication methods of the micro electromechanical system (MEMS) inertial switch is provided. Different MEMS inertial switch studies were reviewed that emphasized acceleration directional and threshold sensitivity, contact characteristics, and their superiorities and disadvantages. Furthermore, the specific fabrication methods offer an applicability reference for the preparation process for the designed inertial switch, including non-silicon surface micromachining technology, standard silicon micromachining technology, and the special fabrication method for the liquid inertial switch. At the end, the main conclusions of the current challenges and prospects about MEMS inertial switches are drawn to assist with the development of research in the field of future engineering applications.

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Section: Intermittent Inertial Switchesmentioning

confidence: 99%

Research Progress of MEMS Inertial Switches

Liu

Niu

et al. 2022

Micromachines

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show abstract

“…Therefore, the inertial switch has the great advantage of acting like an open circuit when not active in the OFF state; it consumes power only when the threshold is exceeded (near zero power consumption). With the emergence of the Internet of Things (IoT), tremendous amounts of inertial sensors are increasingly in demand to meet the market’s needs 6 – 8 . In most cases, inertial switches are designed to have a single threshold which can only provide binary “ON/OFF’ information 9 – 15 .…”

Section: Introductionmentioning

confidence: 99%

Design, simulation, and testing of a tunable MEMS multi-threshold inertial switch

Xu,

Rocha,

Algoos

et al. 2024

Microsyst Nanoeng

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This paper presents a tunable multi-threshold micro-electromechanical inertial switch with adjustable threshold capability. The demonstrated device combines the advantages of accelerometers in providing quantitative acceleration measurements and g-threshold switches in saving power when in the inactive state upon experiencing acceleration below the thresholds. The designed proof-of-concept device with two thresholds consists of a cantilever microbeam and two stationary electrodes placed at different positions in the sensing direction. The adjustable threshold capability and the effect of the shock duration on the threshold acceleration are analytically investigated using a nonlinear beam model. Results are shown for the relationships among the applied bias voltage, the duration of shock impact, and the tunable threshold. The fabricated prototypes are tested using a shock-table system. The analytical results agree with the experimental results. The designed device concept is very promising for the classification of the shock and impact loads in transportation and healthcare applications.

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“…The majority of the reported inertial switches have a single acceleration threshold, so that they only provide ON-OFF information [16][17][18][19][20][21][22]. They produce ON signal if the acceleration is higher than the predesignated threshold level and OFF signal otherwise.…”

Section: Introductionmentioning

confidence: 99%