2007
DOI: 10.1117/12.692308
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A low-noise durable transmissive stamper for multi-layer discs using phase transition mastering

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Cited by 3 publications
(2 citation statements)
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“…The above results considerably differ from those reported in ref. 2, in which the unexposed part is dissolved in the alkali solution while the exposed part remains, although the composition of WO x is unknown and the deposition conditions differ from those in this study. We presume that the difference in detailed ordering even in the amorphous state caused by different deposition conditions causes the opposite results obtained in both studies.…”
mentioning
confidence: 77%
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“…The above results considerably differ from those reported in ref. 2, in which the unexposed part is dissolved in the alkali solution while the exposed part remains, although the composition of WO x is unknown and the deposition conditions differ from those in this study. We presume that the difference in detailed ordering even in the amorphous state caused by different deposition conditions causes the opposite results obtained in both studies.…”
mentioning
confidence: 77%
“…4) It was also shown in ref. 2 that WO x film is available for HMM as a negative-type photoresist material. The negative-type means that the microregion of WO x film transformed by laser irradiation remains and the other region is dissolved by alkali development.…”
mentioning
confidence: 99%