2009
DOI: 10.1109/jsen.2009.2030652
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A Low-Power 2-D Wind Sensor Based on Integrated Flow Meters

Abstract: A 2-D wind sensor, based on microelectromechanical\ud systems (MEMS) flow sensors, is presented. The device consists of\ud a cylinder with a channel network connecting the internal flow sensors\ud with the lateral surface. The pressure distribution developed\ud by the wind on the cylinder’s surface is thus converted into two air\ud flows from which, due to the special channel configuration, wind\ud speed and direction can be unequivocally determined. Since the\ud MEMS devices are located in the channels, their… Show more

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Cited by 70 publications
(46 citation statements)
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“…Two thermally isolated heaters instead of one were used in between two thermopiles and thermal feedback maintained equal temperature between the two heaters under varying flow conditions [84][85][86].…”
Section: Thermoelectricmentioning
confidence: 99%
“…Two thermally isolated heaters instead of one were used in between two thermopiles and thermal feedback maintained equal temperature between the two heaters under varying flow conditions [84][85][86].…”
Section: Thermoelectricmentioning
confidence: 99%
“…This is the case, for example, of gas distribution lines in semiconductor manufacturing equipments [9], fuel/air mixing system in car engines [10] and propellant feed system in thrusters on board satellites [11,12]. Recently, very sensitive integrated flow sensors have been proposed for the development of a directional wind sensor, with robustness, power consumption and miniaturization characteristics suitable for application in wireless sensor networks [13].…”
Section: Open Accessmentioning
confidence: 99%
“…In this case no bonding wire breaks were observed and the conveyor could be easily changed. As far as the sealing is concerned, the devices were suitable for applications where the gas pressure is near the atmosphere value [ 10 ] but excessive leaks were observed in vacuum applications. For this reason, we have investigated a novel method based on a thin cyanoacrylate glue fi lm deposited on the conveyor surface ( Fig.…”
Section: Device Description and Fabricationmentioning
confidence: 99%