A magnetically actuated, high momentum rate MEMS pulsed microjet for active flow control

Ducloux, O.; Viard, R.; Talbi, Abdelkrim; Gimeno, L.; Deblock, Y.; Pernod, Philippe; Preobrazhensky, V.; Merlen, Alain

doi:10.1088/0960-1317/19/11/115031

Cited by 8 publications

(5 citation statements)

References 20 publications

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“…Only a few MEMS pulsed-jet actuator examples showing promising performances have been reported. [6][7][8][9] In contrast, SJAs based on MEMS technologies [10][11][12] do not present satisfactory performance for flow control applications, essentially because of a deficit of velocity due to a very small variation of the cavity volume. A synthetic jet based on a micro-magneto-mechanical system 13 with a full size less than 1 cm 3 and a peak jet velocity of 50 m/s represents existing peak performance of a MEMS SJA, which still falls short of the requirements of this study.…”

Section: Introductionmentioning

confidence: 99%

Development of design methodology for a synthetic jet actuator array for flow separation control applications

Jabbal

Liddle

Potts

et al. 2011

Proceedings of the Institution of Mechanical Engineers, Part G:

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This article documents the development of synthetic jet actuator array hardware to augment high-lift system effectiveness in a wind tunnel model. The study involved the design, manufacture and bench test of a synthetic jet actuator array based on an inclined actuator configuration to reduce volume installation requirements without a loss in jet velocity relative to a non-inclined baseline model; incorporation of proper synthetic jet actuator systems wiring and internal synthetic jet actuator chamber pressure-sensing for actuator health monitoring. The peak velocity obtained from the inclined synthetic jet actuator array was 100 m/s, which favourably compares to the baseline array ($90 m/s), while reducing the usable depth requirements by 50%. The final outcome of this study has been to apply the design lessons learned to develop a methodology for designing a synthetic jet actuator array with the constraints of using piezoelectricbased actuator technology for flow separation control applications.

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Section: Introductionmentioning

confidence: 99%

Development of design methodology for a synthetic jet actuator array for flow separation control applications

Jabbal

Liddle

Potts

et al. 2011

Proceedings of the Institution of Mechanical Engineers, Part G:

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“…In contrast, a low number of satisfactory MEMS actuators, and more precisely fluidic actuators, are available. Only a few MEMS pulsedjet actuator examples showing promising performances for flow control applications have been reported [4]: the French startup FLOWDIT's electrostatic guillotine microvalve [5], the Besançon University laboratory FEMTO-ST's 'Zip' electrostatic actuator [6], the BAE Systems piezoelectric micro-valve [7], and IEMN/LEMAC electromagnetic pulsed microjets [4,[8][9][10]. In contrast, synthetic jets based on MEMS technologies [11][12][13][14] do not present satisfactory performances for flow control applications, essentially because of a deficit of velocity due to a very small variation of the cavity volume.…”

Section: Introductionmentioning

confidence: 99%

Synthetic jets based on micro magneto mechanical systems for aerodynamic flow control

Gimeno¹,

Talbi²,

Viard³

et al. 2010

J. Micromech. Microeng.

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A magneto-mechanical micro-actuator providing an axisymmetric synthetic microjet for active flow control was designed, fabricated and characterized. The micro-actuator consists of an enclosed cavity with a small orifice in one face and a high flexible elastomeric (PDMS) membrane in the opposite one. The membrane vibration is achieved using a magnetic actuation chosen for its capacity for providing large out of plane displacements and forces necessary for the performances aimed for. The paper presents first numerical simulations of the flow performed during the design process in order to identify a general jet formation criterion and optimize the device's performances. The fabrication process of this micro-magneto-mechanical system (MMMS) is then briefly described. The full size of the device, including packaging and actuation, does not exceed 1 cm 3 . The evaluation of the performances of the synthetic jet with 600 μm orifice was performed. The results show that the optimum working point is in the frequency range 400-700 Hz which is in accordance with the frequency response of the magnet-membrane mechanical resonator. In this frequency range, the microjet reaches maximum speeds ranging from 25 m s −1 to 55 m s −1 for an electromagnetic power consumption of 500 mW. Finally the axial velocity transient and stream-wise behaviours in the near and far fields are reported and discussed.

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“…Pulsed jets [11,12] and synthetic jets of air that have been developed by several researchers for applications such as flow control [13][14][15][16][17] and heat transfer [18][19][20][21] could also be used for force application. The pulsed air jets have been shown to produce flow velocities of 150 m s −1 [11] and 200 m s −1 to 300 m s −1 [12] with pressurized air. A synthetic jet actuator comprises a cavity with an orifice.…”

Section: Introductionmentioning

confidence: 99%

“…We demonstrate that air jets can be used to exert forces in the micro-Newton to milli-Newton range in non-contact mode. The pulsed air jets described before [11,12] require pressurized air or gas to operate. Moreover, the valve required to control the jet flow to generate short pulses of jet is complicated and often requires micro-fabrication techniques for miniaturization.…”

Section: Introductionmentioning

confidence: 99%

Air microjet system for non-contact force application and the actuation of micro-structures

Khare

Venkataraman

2015

J. Micromech. Microeng.

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We demonstrate a non-contact technique to apply calibrated and localized forces in the micro-Newton to milli-Newton range using an air microjet. An electromagnetically actuated diaphragm controlled by a signal generator is used to generate the air microjet. With a nozzle diameter of 150 μm, the microjet diameter was maintained to a maximum of 1 mm at a distance of 5 mm from the nozzle. The force generated by the microjet was measured using a commercial force sensor to determine the velocity profile of the jet. Axial flow velocities of up to 25 m s−1 were obtained at distances as long as 6 mm. The microjet exerted a force up to 1 μN on a poly dimethyl siloxane (PDMS) micropillar (50 μm in diameter, 157 μm in height) and 415 μN on a PDMS membrane (3 mm in diameter, 28 μm thick). We also demonstrate that from a distance of 6 mm our microjet can exert a peak pressure of 187 Pa with a total force of about 84 μN on a flat surface with 8 V operating voltage. Out of the cleanroom fabrication and robust design make this system cost effective and durable.

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A magnetically actuated, high momentum rate MEMS pulsed microjet for active flow control

Cited by 8 publications

References 20 publications

Development of design methodology for a synthetic jet actuator array for flow separation control applications

Development of design methodology for a synthetic jet actuator array for flow separation control applications

Synthetic jets based on micro magneto mechanical systems for aerodynamic flow control

Air microjet system for non-contact force application and the actuation of micro-structures

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