ZnO thin film-based surface acoustic wave (SAW) devices have been fabricated on Si, glass and polyimide (PI) substrates, and their microfluidic performances were compared. The Rayleigh and Sezawa mode waves were observed from the ZnO/Si devices, the Rayleigh and Lamb modes from the ZnO/PI, and only the Rayleigh mode from the ZnO/glass devices. The ZnO/Si devices have the best performance with the highest acoustic streaming velocity of about 10 cm/s and the shortest particle concentration time of less than 10 sec. The ZnO/glass SAW devices deliver comparable performances to that on Si substrate, while the ZnO/PI devices perform not as good as the devices on other two types of substrates due to the large acoustic attenuation, but still can deliver a streaming velocity up to 1.0 cm/s and reasonable particle concentration function with a particle concentration time of ~70 sec.Owing to its low cost, easy fabrication and compatible with traditional glass-based biochemical analysis systems, ZnO/glass SAW device is believed to have better potential for lab-on-a-chip application.In recent years, lab-on-a-chip (LOC) technology has attracted great attentions for research and development, and has been widely utilized in chemical, biological and medical applications. 1-8 Microfluidics including liquid transportation, pumping, mixing, digitizating etc, and sensors are the two main components of LOC microsystems. Various effects have been utilized to develop microfluidics such as bimorph structure, electrostatic and piezoelectric mechanisms. Moving part-free microfluidics based on kinetic energy such as electroosmosis, 9, 10 electrophoresis, 11, 12 dielectrophoresis 13, 14 etc are preferred owing to its advantages of excellent reliability, easy fabrication and operation etc.Surface acoustic wave (SAW) device is one of the building blocks for electronics and microsystems, 15-17 and can also be utilized for accurate sensing, efficient fluidic actuation and manipulation. 18-23 Therefore SAW-based microfluidic devices and sensors will play an important role in single mechanism based-LOCs in the future. SAW-based microfluidics have the advantages of low cost, high stability, easy fabrication and operation, 24 and have been intensively investigated and studied in recent years. Wixforth demonstrated the principle of SAW-based microfluidic. 25 Li et al demonstrated the particle concentration effect on LiNbO 3 substrate 26 and Alghane et al conducted numerical simulation for liquid mixing and particleconcentration. 27 They also discussed the frequency effect and scaling effect on the performance of SAW-based microfluidics. 28,29 Shi et al showed that standing surface acoustic wave (SSAW) can be used for particle sorting and manipulation. 30 Reboud et al reported the ability to do cell lyses using SAW on LiNbO 3 substrate. 31 One of the key issues for widespread application of LOCs and microfluidics is the cost of the materials and devices involved, which is the same for the SAW-based microfluidics and LOCs. At the early study, SAW-based...