A MEMS 1-D optical scanner for laser projection display using self-assembled vertical combs and scan-angle magnifying mechanism

Yoshida, Masaki; Isamoto, Keiji; Chong, Changho; Ito, Hiromasa; Murata, A.; Kamisuki, S.; Atobe, Mitsurou; Toshiyoshi, Hiroshi

doi:10.1109/sensor.2005.1496616

Cited by 13 publications

(8 citation statements)

References 3 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…It should be mentioned that lateral pull-in between comb fingers is a potential issue but could be mitigated by MEMS design (such as V-shaped torsion beam [60] or off-centered combs [61]). Several variations of vertical comb drive mirrors have been reported, including selfaligned vertical combs [62], [63], angular vertical combs [64], [65], electrostatically assembled vertical combs [66], and thick vertical combs (100 µm) attached to mirror edges on doublesided SOI wafers [44], [60].…”

Section: Three-dimensional Mems Switchesmentioning

confidence: 99%

Optical MEMS for Lightwave Communication

Solgaard

Ford

2006

J. Lightwave Technol.

307

141

View full text Add to dashboard Cite

Abstract-The intensive investment in optical microelectromechanical systems (MEMS) in the last decade has led to many successful components that satisfy the requirements of lightwave communication networks. In this paper, we review the current state of the art of MEMS devices and subsystems for lightwave communication applications. Depending on the design, these components can either be broadband (wavelength independent) or wavelength selective. Broadband devices include optical switches, crossconnects, optical attenuators, and data modulators, while wavelength-selective components encompass wavelength add/drop multiplexers, wavelength-selective switches and crossconnects, spectral equalizers, dispersion compensators, spectrometers, and tunable lasers. Integration of MEMS and planar lightwave circuits, microresonators, and photonic crystals could lead to further reduction in size and cost.

show abstract

Section: Three-dimensional Mems Switchesmentioning

confidence: 99%

Optical MEMS for Lightwave Communication

Solgaard

Ford

2006

J. Lightwave Technol.

307

141

View full text Add to dashboard Cite

show abstract

“…There has been an intense research on ES MEMS scanners for more than one decade [73], [74], [77], [79], [85], [98]. The first well-characterized high-frequency ES scanner for display applications was published in 2000 by Conant et al [43].…”

Section: A Electrostatically Actuated Scannersmentioning

confidence: 99%

MEMS Laser Scanners: A Review

Holmström

Baran

Ürey

2014

J. Microelectromech. Syst.

405

175

View full text Add to dashboard Cite

Laser scanners have been an integral part of MEMS research for more than three decades. During the last decade, miniaturized projection displays and various medicalimaging applications became the main driver for progress in MEMS laser scanners. Portable and truly miniaturized projectors became possible with the availability of red, green, and blue diode lasers during the past few years. Inherent traits of the laser scanning technology, such as the very large color gamut, scalability to higher resolutions within the same footprint, and capability of producing an always-in-focus image render it a very viable competitor in mobile projection. Here, we review the requirements on MEMS laser scanners for the demanding display applications, performance levels of the best scanners in the published literature, and the advantages and disadvantages of electrostatic, electromagnetic, piezoelectric, and mechanically coupled actuation principles. Resonant high-frequency scanners, low-frequency linear scanners, and 2-D scanners are included in this review. [2013-0235]

show abstract

“…The actuator and the moving bodies are co-fabricated in a single structural layer [3,6]. To mitigate the high viscous damping of comb fingers attached directly to the mirror at resonance with large rotations, a mechanical coupling principle is utilized, as has been done previously by our group and others [4,[10][11]. In applying this principle, the comb fingers are placed on coupled moving body that undergoes smaller rotations than the mirror.…”

Section: Mechanically Coupled Electrostatic Torsional Scannergmentioning

confidence: 99%