2004
DOI: 10.1299/jsmeb.47.453
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A MEMS-Based Active-Head Slider for Flying Height Control in Magnetic Recording

Abstract: This paper describes design and fabrication of a MEMS-based active-head slider using a PZT thin film for flying height control in hard disk drives. A piezoelectric cantilever integrated in an air bearing slider is used to adjust the flying height individually. A novel air bearing surface (ABS) geometry that minimizes the aerodynamic lift force generated beneath the head has been designed on the basis of the molecular gas film lubrication (MGL) theory. The slider with PZT actuator was fabricated monolithically … Show more

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Cited by 15 publications
(6 citation statements)
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“…Kurita et al (2003) proposed a slider using a PZT sheet. Suzuki and Kurita (2003) proposed a slider using PZT sol-gel thin film. Although these active-head sliders with PZT/silicon unimorph actuator were as large as the current sliders, they could not be adapted to the conventional slider process, because they required processing on the surface opposite the ABS.…”
Section: Objectivementioning
confidence: 99%
See 1 more Smart Citation
“…Kurita et al (2003) proposed a slider using a PZT sheet. Suzuki and Kurita (2003) proposed a slider using PZT sol-gel thin film. Although these active-head sliders with PZT/silicon unimorph actuator were as large as the current sliders, they could not be adapted to the conventional slider process, because they required processing on the surface opposite the ABS.…”
Section: Objectivementioning
confidence: 99%
“…The upper electrode is connected to a pad on the magnetic head of the slider. The structures of the proposed active-head sliders (Tagawa et al 2003;Kurita et al 2003;Suzuki and Kurita 2003) have low stiffness, while that of PFC slider has greater stiffness because PFC slider does not have a supporting beam structure and the magnetic head is only driven by PZT deformation. The stiffness has a great influence on fly ability.…”
Section: Objectivementioning
confidence: 99%
“…Researchers have tried to apply the piezoelectric actuation technology into the slider design to control the active flying height [1][2][3][4][5]. However, its complicated fabrication process [2,3] and the high operating temperature [6] prevented the mass production of the piezoelectric actuation slider. As an alternative solution, the thermal actuation technology was newly developed to control the head-media-spacing (HMS) adaptively [7], where a micro-heater in a slider manages the amount of thermal expansion of read/write elements outward the air bearing surface (ABS).…”
Section: Introductionmentioning
confidence: 99%
“…To achieve such an ultra-small head-disk clearance, the wide distribution of head-disk clearance due to current manufacturing tolerances is the biggest problem to be solved. To solve this problem, the concept of individual and in-situ adjustment of head-disk clearance by means of a micro-actuator built-in into a HDD slider has been proposed [1][2][3][4][5]. Applying this concept, the authors previously developed a thermal-flying-height-control (TFC) slider that carries a micro-thermal actuator (heater) at the trailing end of the slider [9][10][11][12][13].…”
Section: Introductionmentioning
confidence: 99%