Active-head slider with piezoelectric actuator using shear-mode deformation

Abstract

The active-head slider technology for hard disk drive is one of the most promising means to decrease flying height. This paper describes a piezoelectric flying height control slider which has a faster dynamic response compared with conventional active-head sliders. This slider can be also adapted to the conventional slider-fabrication process. PZT layer located near the magnetic head has shear mode deformation by applying electric voltage between the upper and lower electrodes when the flying height of magnetic head needs to be decreased or increased. We fabricated a prototype with single crystal Si substrate for feasibility study. Our evaluation of the prototype revealed that the piezoelectric constant of the shear mode deformation was 0.88 nm/V, and the dynamic response was 50 kHz. The shape of the air bearing surface was optimized by simulations using a robust design method. We found that the stroke was 8 nm for an applied voltage of 11 V if the flying height was 11 nm with no deformation in PZT.

Preparation and characterization of ZnO microcantilever for nanoactuation

“…So, it is necessary to detect the slider-disk contact and then adjust the spacing to decrease the damage to the head-disk interface. Due to quick response and contact detection ability, many piezoelectric sensors/actuators based on bulk and thin film lead zirconate titanate [PZT] have been proposed in order to solve the above problem [ 2 , 3 ]. However, it is hard to fabricate a bulk PZT material into a microscale dimension.…”

Investigation of ad15mode PZT-51 piezoelectric energy harvester with a series connection structure

“…The explanation for the different resonance frequencies of the curves as shown in figure 6 can be given as follows. By the converse piezoelectric effect, the voltage V of the load resistance generated by the direct piezoelectric effect may produce an inverse displacement which hinders the bending of the cantilever beam and can be expressed as z = d 15 × V [28]. Because V is directly proportional to the area A of the piezoelectric elements [12], z increases with increasing A, and then the increasing z will lead to decreasing vibration displacement of the cantilever beam.…”

An approach for non-stationary and nonlinear vibration identification and control of active air-bearing slider system

“…The activehead slider technology for hard disk drive has been one of the most promising means to decrease flying height and to attain interface stability (Naniw et al 2009;Juang et al 2007; Kurita et al 2003Kurita et al , 2006Tagawa et al 2003;Sheng et al 2000a, b;Yeack-Scranton et al 1990). There were many researches on the design and development of piezoelectric (PZT) flying height control active slider.…”