Preparation and characterization of ZnO microcantilever for nanoactuation

Wang, Peihong; Du, Hejun; Shen, Shengnan; Zhang, Mingsheng; Liu, Bo

doi:10.1186/1556-276x-7-176

Cited by 22 publications

(11 citation statements)

References 12 publications

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“…The other characterizations of the ZnO film can be found in our published literatures. 20,21 For an energy harvester, its resonant frequency is a very important parameter. So, the natural frequency of the ZnO energy harvester is first evaluated by simulation.…”

Section: Resultsmentioning

confidence: 99%

ZnO thin film piezoelectric MEMS vibration energy harvesters with two piezoelectric elements for higher output performance

Wang

2015

Review of Scientific Instruments

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Zinc oxide (ZnO) thin film piezoelectric microelectromechanical systems (MEMS) based vibration energy harvesters with two different designs are presented. These harvesters consist of a silicon cantilever, a silicon proof mass, and a ZnO piezoelectric layer. Design I has a large ZnO piezoelectric element and Design II has two smaller and equally sized ZnO piezoelectric elements; however, the total area of ZnO thin film in two designs is equal. The ZnO thin film is deposited by means of radio-frequency magnetron sputtering method and is characterized by means of XRD and SEM techniques. These ZnO energy harvesters are fabricated by using MEMS micromachining. The natural frequencies of the fabricated ZnO energy harvesters are simulated and tested. The test results show that these two energy harvesters with different designs have almost the same natural frequency. Then, the output performance of different ZnO energy harvesters is tested in detail. The effects of series connection and parallel connection of two ZnO elements on the load voltage and power are also analyzed. The experimental results show that the energy harvester with two ZnO piezoelectric elements in parallel connection in Design II has higher load voltage and higher load power than the fabricated energy harvesters with other designs. Its load voltage is 2.06 V under load resistance of 1 MΩ and its maximal load power is 1.25 μW under load resistance of 0.6 MΩ, when it is excited by an external vibration with frequency of 1300.1 Hz and acceleration of 10 m/s(2). By contrast, the load voltage of the energy harvester of Design I is 1.77 V under 1 MΩ resistance and its maximal load power is 0.98 μW under 0.38 MΩ load resistance when it is excited by the same vibration.

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Section: Resultsmentioning

confidence: 99%

ZnO thin film piezoelectric MEMS vibration energy harvesters with two piezoelectric elements for higher output performance

Wang

2015

Review of Scientific Instruments

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“…The optimized process parameters for preparation of the ZnO thin film are listed in Table 3. Characterization results of sputtered ZnO thin films were reported in our previous studies [29]. Following ZnO sputtering, another 100 nm of Au/Cr is deposited for the top electrode (Fig.…”

Section: Fabricationmentioning

confidence: 90%

A ZnO microcantilever for high-frequency nanopositioning: Modeling, fabrication and characterization

Yuan¹,

Du²,

Wang³

et al. 2013

Sensors and Actuators A: Physical

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“…ZnO is a widely used piezoelectric material for MEMS technology due to its properties like ease of deposition, low deposition temperature, compatibility with micro fabrication technology [3], good piezoelectric performance and excellent bonding with a variety of substrates [4]. The present work illustrates a simple technique to modify an AFM cantilever by integrating a highly sensitive piezoelectric ZnO thin film for tapping mode applications.…”

Section: Introductionmentioning

confidence: 98%

AFM cantilever with integrated piezoelectric thin film for micro-actuation

et al. 2012

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This work presents micro-actuation of atomic force microscopy (AFM) cantilevers using piezoelectric Zinc Oxide (ZnO) thin film. In tapping mode AFM, the cantilever is driven near its resonant frequency by an external oscillator such as piezotube or stack of piezoelectric material. Use of integrated piezoelectric thin film for AFM cantilever eliminates the problems like inaccurate tuning and unwanted vibration modes. In this work, silicon AFM cantilevers were sputter deposited with ZnO piezoelectric film along with top and bottom metallic electrodes. The self-excitation of the ZnO coated AFM cantilever was studied using Laser Doppler Vibrometer (LDV). At its resonant frequency (227.11 kHz), the cantilever displacement varies linearly with applied excitation voltage. We observed an increase in the actuation response (131nm/V) due to improved quality of ZnO films deposited at 200 °C.

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Preparation and characterization of ZnO microcantilever for nanoactuation

Cited by 22 publications

References 12 publications

ZnO thin film piezoelectric MEMS vibration energy harvesters with two piezoelectric elements for higher output performance

ZnO thin film piezoelectric MEMS vibration energy harvesters with two piezoelectric elements for higher output performance

A ZnO microcantilever for high-frequency nanopositioning: Modeling, fabrication and characterization

AFM cantilever with integrated piezoelectric thin film for micro-actuation

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