A ZnO microcantilever for high-frequency nanopositioning: Modeling, fabrication and characterization

Yuan, Yanhui; Du, Hejun; Wang, Peihong; Chow, K. S.; Zhang, Mingsheng; Yu, Shengkai; Liu, Bo

doi:10.1016/j.sna.2013.02.002

Cited by 9 publications

(3 citation statements)

References 35 publications

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“…[10][11][12][13][14][15][16][17] As the critical issues of mechanical performance of microcantilevers, Young's modulus [18][19][20][21][22][23] and resonant frequency [24][25][26][27][28][29][30][31] have been studied by various characterizations. In this research, atomic force microscopy (AFM) measurement is conducted to characterize resonant frequency of multi-layer microcantilevers, and a theoretical model is proposed and discussed including the impact of coating on both Young's modulus and resonant frequency.…”

confidence: 99%

Young’s modulus of multi-layer microcantilevers

Deng

et al. 2017

AIP Advances

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A theoretical model for calculating the Young’s modulus of multi-layer microcantilevers with a coating is proposed, and validated by a three-dimensional (3D) finite element (FE) model using ANSYS parametric design language (APDL) and atomic force microscopy (AFM) characterization. Compared with typical theoretical models (Rayleigh-Ritz model, Euler-Bernoulli (E-B) beam model and spring mass model), the proposed theoretical model can obtain Young’s modulus of multi-layer microcantilevers more precisely. Also, the influences of coating’s geometric dimensions on Young’s modulus and resonant frequency of microcantilevers are discussed. The thickness of coating has a great influence on Young’s modulus and resonant frequency of multi-layer microcantilevers, and the coating should be considered to calculate Young’s modulus more precisely, especially when fairly thicker coating is employed.

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confidence: 99%

Young’s modulus of multi-layer microcantilevers

Deng

et al. 2017

AIP Advances

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“…[18][19][20] Of them, PZT [21,22] is the most extensively used materials so far. However, ZnO [23,24] needs investigating because it is made more suitable for micro-nano scale and flexible devices, especially in piezoelectric film fabrication. The ZnO film can be produced by some methods, for example film-based extension, film magnetron sputtering, sol-gel, coating methods, etc.…”

Section: Introductionmentioning

confidence: 99%

Performance of beam-type piezoelectric vibration energy harvester based on ZnO film fabrication and improved energy harvesting circuit

Gao

Zhang

et al. 2020

Chinese Phys. B

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We demonstrate a piezoelectric vibration energy harvester with the ZnO piezoelectric film and an improved synchronous electric charge extraction energy harvesting circuit on the basis of the beam-type mechanical structure, especially investigate its output performance in vibration harvesting and ability to generate charges. By establishing the theoretical model for each of vibration and circuit, the numerical results of voltage and power output are obtained. By fabricating the prototype of this harvester, the quality of the sputtered film is explored. Theoretical and experimental analyses are conducted in open-circuit and closed-circuit conditions, where the open-circuit mode refers to the voltage output in relation to the ZnO film and external excitation, and the power output of the closed-circuit mode is relevant to resistance. Experimental findings show good agreement with the theoretical ones, in the output tendency. It is observed that the properties of ZnO film achieve regularly direct proportion to output performance under different excitations. Furthermore, a maximum experimental power output of 4.5 mW in a resistance range of 3 kΩ–8 kΩ is achieved by using an improved synchronous electric charge extraction circuit. The result is not only more than three times the power output of classic circuit, but also can broaden the resistance to a large range of 5 kΩ under an identical maximum value of power output. In this study we demonstrate the fundamental mechanism of piezoelectric materials under multiple conditions and take an example to show the methods of fabricating and testing the ZnO film. Furthermore, it may contribute to a novel energy harvesting circuit with high output performance.

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“…Due to its superior optical and electronic properties, ZnO has been widely used in various applications, including solar cells [22][23][24], gas sensors [25], biosensors [26], light emitting diodes [27], and acoustic waves and devices [28]. It is believed that due to its reversible wettability and other advanced properties, ZnO has great potential in smart devices [29,30], environmental purification [31,32], energy harvesting [33,34], etc. Considering the variety of the ZnO nanostructures and the coupled advantages, investigations into the improvement of the efficiency of switching between hydrophobic and hydrophilic states is still highly demanded.…”

Section: Introductionmentioning

confidence: 99%

Fast light-induced reversible wettability of a zinc oxide nanorod array coated with a thin gold layer

Wei¹,

Du²,

Kong³

et al. 2017

Nanotechnology

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Zinc oxide (ZnO) has gained much attention recently due to its excellent physical and chemical properties, and has been extensively studied in energy harvesting applications such as photovoltaic and piezoelectric devices. In recent years, its reversible wettability has also attracted increasing interest. The wettability of ZnO nanostructures with various morphologies has been studied. However, to the best of our knowledge, there is still a lack of investigations on further modifications on ZnO to provide more benefits than pristine ZnO. Comprehensive studies on the reversible wettability are still needed. In this study, a ZnO nanorod array was prepared via a hydrothermal process and subsequently coated with thin gold layers with varied thickness. The morphologies and structures, optical properties and wettability were investigated. It is revealed that the ZnO-Au system possesses recoverable wettability upon switching between visible-ultraviolet light and a dark environment, which is verified by the contact angle change. The introduction of the thin gold layer to the ZnO nanorod array effectively increases the recovery rate of the wettability. The improvements are attributed to the hierarchical structures, which are formed by depositing thin gold layers onto the ZnO nanorod array, the visible light sensitivity due to the plasmonic effect of the deposited gold, as well as the fast charge-induced surface status change upon light illumination or dark storage. The improvement is beneficial to applications in environmental purification, energy harvesting, micro-lenses, and smart devices.

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A ZnO microcantilever for high-frequency nanopositioning: Modeling, fabrication and characterization

Cited by 9 publications

References 35 publications

Young’s modulus of multi-layer microcantilevers

Young’s modulus of multi-layer microcantilevers

Performance of beam-type piezoelectric vibration energy harvester based on ZnO film fabrication and improved energy harvesting circuit

Fast light-induced reversible wettability of a zinc oxide nanorod array coated with a thin gold layer

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