A MEMS-based flexible sensor and actuator system for space inflatable structures

Tung, Steve; Witherspoon, S Robert; Roe, L.; Silano, Al; Maynard, D P; Ferraro, Ned

doi:10.1088/0964-1726/10/6/312

Cited by 73 publications

(39 citation statements)

References 12 publications

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“…These applications include flexible organic light-emitting displays, [1,2] thin film transistors, [3][4][5] sensors, [6,7] and polymer MEMS. [8,9] The advantages of polymer-based materials are their mechanical flexibility, light weight, enhanced durability, and low cost compared with rigid materials (such as silicon and quartz). However, it can be difficult to integrate polymers into an integrated circuit (IC) microfabrication process due to their low thermal stability (low melting and low glass transition temperatures) and solvent susceptibility.…”

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confidence: 99%

Nanoscale Patterning and Electronics on Flexible Substrate by Direct Nanoimprinting of Metallic Nanoparticles

et al. 2008

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Recent years have witnessed an expanding interest in the application of flexible polymer materials (e.g., polyimide, polyester, etc.) as the substrates for electronic and display devices. These applications include flexible organic light-emitting displays, [1,2] thin film transistors, [3][4][5] sensors, [6,7] and polymer MEMS. [8,9] The advantages of polymer-based materials are their mechanical flexibility, light weight, enhanced durability, and low cost compared with rigid materials (such as silicon and quartz). However, it can be difficult to integrate polymers into an integrated circuit (IC) microfabrication process due to their low thermal stability (low melting and low glass transition temperatures) and solvent susceptibility. In practice, conventional IC fabrication processes are subject to limitations, in that they are multi-step, involve high processing temperatures, caustic baths and strong solvents. In order to address the current problems of microfabrication on flexible substrate, many alternative approaches to conventional photolithography-based process have been introduced by a number of researchers. These include microcontact printing (lCP) combined with metal etching, [10] electroless plating, [11] electropolymerization, [12] and direct metal layer transfer [13] for the microscale metal patterning on flexible substrates. Stencil lithography [14] was mainly applied for dielectric layer patterning on polymer substrates for the formation of electrical capacitors [15,16] due to its limited resolution. Inkjet printing was used for a drop-on-demand patterning of conductive polymer PEDOT [17] and gold [18] layers for drain-source and gate electrodes. However, its best resolution is 20-50 lm [19,20] limited by the nozzle diameter, the statistical variation of the droplet flight, and spreading on the substrate. Organic semiconducting materials are being widely used as semiconducting layers in flexible electronics due to their costeffectiveness, mechanical flexibility, and ease of application via specific chemical modification. However, further channel size down-scaling is essential for better performance of organic field effect transistor due to the lower carrier mobility of the organic semiconducting materials. While the abovementioned methods cannot achieve ultrafine features (a few lm's down to ∼ 100 nm) in high aerial density and good reproducibility, nanoimprinting lithography (NIL) allows easy fabrication of precise nanoscale structures. NIL has been applied for nanopatterning in various fields such as biological nanostructures, [21] nanophotonic devices, [22,23] organic electronics, [24,25] and the patterning of magnetic materials. [26] Especially, metal nanopatterning via nanoimprinting is widely employed in nanoscale electronics and biosensing platforms. However, metal nanoimprinting has been typically an indirect process where a polymer (e.g., PMMA) pattern is first created by nanoimprinting, and then used as a mask for metal film etching or metal lift-off process. [27] This involves multiple and ...

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confidence: 99%

Nanoscale Patterning and Electronics on Flexible Substrate by Direct Nanoimprinting of Metallic Nanoparticles

et al. 2008

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“…Various smart materials such as shape-memory alloys (SMAs) [4], polyvinylidene fluoride (PVDF) films [5][6][7], piezoelectric polymer actuators [8], macrofiber composites [9,10], and microelectromechanical system transducers [11] have been used to control the surface shape of membrane structures. A parabolic deformable mirror with a piezoelectric thin film was studied and controlled based on an in-plane actuation strategy by Maji et al [12] and the active control precision proved to reach the micron level.…”

Section: Introductionmentioning

confidence: 99%

Adaptive Shape Control for Thermal Deformation of Membrane Mirror with In-plane PVDF Actuators

Yue

Deng

et al. 2018

Chin. J. Mech. Eng.

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Optical membrane mirrors are promising key components for future space telescopes. Due to their ultra-thin and high flexible properties, the surfaces of these membrane mirrors are susceptible to temperature variations. Therefore adaptive shape control of the mirror is essential to maintain the surface precision and to ensure its working performance. However, researches on modeling and control of membrane mirrors under thermal loads are sparse in open literatures. A 0.2 m diameter scale model of a polyimide membrane mirror is developed in this study. Three Polyvinylidene fluoride (PVDF) patches are laminated on the non-reflective side of the membrane mirror to serve as in-plane actuators. A new mathematical model of the piezoelectric actuated membrane mirror in multiple fields, (i.e., thermal, mechanical, and electrical field) is established, with which dynamic and static behaviors of the mirror can be analyzed. A closed-loop membrane mirror shape control system is set up and a surface shape control method based on an influence function matrix of the mirror is then investigated. Several experiments including surface displacement tracking and thermal deformation alleviation are performed. The deviations range from 15 μm to 20 μm are eliminated within 0.1 s and the residual deformation is controlled to micron level, which demonstrates the effectiveness of the proposed membrane shape control strategy and shows a satisfactory real-time performance. The proposed research provides a technological support and instruction for shape control of optical membrane mirrors.

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“…Printing offers the potential for low-cost, large-area electronics for displays, sensors, radiofrequency identification, and polymer micro-electromechanical systems. [1][2][3][4][5][6] Crucial components of printed electronics include conductive lines and electrodes using metal nanoparticle inks. Gold nanoparticles have been used for conductive materials due to their high electrical conductivity and thermal stability.…”

Section: Introductionmentioning

confidence: 99%

Effect of Thickness on Surface Morphology of Silver Nanoparticle Layer During Furnace Sintering

Moon

Kang

et al. 2015

Journal of Elec Materi

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In printed electronics applications, specific resistances of conductive lines are critical to the performance of the devices. The specific resistance of a silver (Ag) nanoparticle electrode is affected by surface morphology of the layered nanoparticles which were sintered by the heat treatment after printing. In this work, the relationship between surface morphology and specific resistance was investigated with various sintering temperatures and various layer thicknesses of Ag nanoparticle ink. Ag nanoparticles with an average size of approximately 50 nm were spin-coated on Eagle XG glass substrates with various spin speed to change the layer thickness of Ag nanoparticles from 200 nm to 900 nm. Coated Ag nanoparticle layers were heated from 150°C to 450°C for 30 min in a furnace. The result showed that higher sintering temperature produces larger grains in an Ag layer and decreases specific resistance of the layer, but that the maximum allowable heating temperature is limited by the thickness of the layer. When grain size exceeded the thickness of the layer, the morphology of the Ag nanoparticles changed to submicronsized islands and the Ag layers did not have electrical conductivity any more.

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A MEMS-based flexible sensor and actuator system for space inflatable structures

Cited by 73 publications

References 12 publications

Nanoscale Patterning and Electronics on Flexible Substrate by Direct Nanoimprinting of Metallic Nanoparticles

Nanoscale Patterning and Electronics on Flexible Substrate by Direct Nanoimprinting of Metallic Nanoparticles

Adaptive Shape Control for Thermal Deformation of Membrane Mirror with In-plane PVDF Actuators

Effect of Thickness on Surface Morphology of Silver Nanoparticle Layer During Furnace Sintering

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