A MEMS-based piezoelectric power generator array for vibration energy harvesting

Liu, Jingquan; Fang, Hua-Bin; Xu, Zhengyi; Mao, Xin-Hui; Shen, Xiu-Cheng; Chen, Di; Liao, Hang; Cai, Bingchu

doi:10.1016/j.mejo.2007.12.017

Cited by 418 publications

(217 citation statements)

References 13 publications

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“…Figure 7. Photograph of power generator array prototype [35] 2. Different types of MEMS power generators and their theoretical models D33 and d31 are the two main modes of piezoelectric cantilever beam.…”

Section: Literature Reviewmentioning

confidence: 99%

Piezoelectric MEMS Power Generators for Vibration Energy Harvesting

Wu¹,

Lee²

2012

Small-Scale Energy Harvesting

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Section: Literature Reviewmentioning

confidence: 99%

Piezoelectric MEMS Power Generators for Vibration Energy Harvesting

Wu¹,

Lee²

2012

Small-Scale Energy Harvesting

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“…The natural frequency can be tuned by adjusting the weight of the tip mass. To overcome the issue of low power output level, Liu et al (2008) studied a micro array of a multi-layered composite cantilever beam generating 3.98μw of effective electric power, yet the study did not show results on the micro-array system's frequency band coverage (although natural frequency of three individual beams is presented in the study).…”

Section: Introductionmentioning

confidence: 99%

Modeling, Simulation and Optimization of Piezoelectric Bimorph Transducer for Broadband Vibration Energy Harvesting

Chen¹,

Bedekar²

2017

JMSR

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We demonstrate the detailed analysis for conversion of piezoelectric properties into compliance matrix and simulate a series bimorph configuration for vibration based energy generation. Commercially available software COMSOL Multiphysics was used to apply boundary conditions for optimization of geometric parameters such as length, width and thickness of piezoelectric layer to study voltage and power characteristics of the harvester. The resulting energy harvester was found to generate 1.73 mW at 53.4 Hz across a 3MΩ load with an energy density of 13.08mJ/cm3. We also investigated feasibility of this model by comparing it with existing experimental data of known piezoelectric ceramic compositions and found good correlation between the two.

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“…However, this type of harvesters has so narrow operating bandwidth that variation in the ambient vibration frequency often makes them less useful. To enlarge operational frequency bandwidth, Liu et al [5] proposed to utilize several piezoelectric cantilevers with different resonant frequencies as an array. Since in the proposed structure only one cantilever operates at one time, the device power density is very low.…”

Section: Introductionmentioning

confidence: 99%

Design and Optimization of Wideband Multimode Piezoelectric MEMS Vibration Energy Harvesters

Nabavi

Zhang

2017

Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017

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Abstract:To enlarge operating frequency bandwidth of the multimode energy harvesters, nonlinearity characteristics has to be well presented by the system configuration. Therefore, the conventional optimization techniques, which are solely based on human observation, are highly difficult and somehow impossible. In this paper we propose an efficient optimization technique for automating the design of nonlinear piezoelectric MEMS energy harvesters based on Genetic Algorithm (GA) with minimum human efforts. In this regard, a MEMS piezoelectric harvester with capability of operating at multimode is proposed and a GA-based optimization methodology is utilized to shift its operational modes close to each other by optimizing device physical aspects. The experiments on post-optimization resonant frequencies show that our proposed optimization methodology is able to reduce the resonant frequencies by 13%, 10% and 9.5% for the first, second and third modes, respectively. In addition, the numerical simulation shows that our optimized energy harvester with a total chip area of 16-mm 2 is able to maximally generate 655 mV, 80 mV and 572 mV at the first (153 Hz), second (168 Hz) and third (219 Hz) modes, respectively under 1 g vibration.

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A MEMS-based piezoelectric power generator array for vibration energy harvesting

Cited by 418 publications

References 13 publications

Piezoelectric MEMS Power Generators for Vibration Energy Harvesting

Piezoelectric MEMS Power Generators for Vibration Energy Harvesting

Modeling, Simulation and Optimization of Piezoelectric Bimorph Transducer for Broadband Vibration Energy Harvesting

Design and Optimization of Wideband Multimode Piezoelectric MEMS Vibration Energy Harvesters

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