A MEMS Non-interferometric Differential Confocal Scanning Optical Microscope

Piyawattanametha, Wibool; Patterson, P.R.; Su, Guo-Dung John; Toshiyoshi, Hiroshi; Wu, Ming C.

doi:10.1007/978-3-642-59497-7_140

Cited by 11 publications

(4 citation statements)

References 10 publications

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“…Some MEMS-based miniaturized confocal microscopes have been already reported [2][3][4] . In these reports, the miniaturized scanning head including the lenses and the scanners was separated from an optical source and a detector by the optical fiber.…”

Section: Introductionmentioning

confidence: 99%

A miniature confocal optical scanning microscope for endoscopes

Murakami

2005

SPIE Proceedings

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We have developed a unique miniature confocal optical scanning microscope as an endoscopic application and successfully obtained a real time image. The confocal microscope can observe the longitudinal direction of a scanning head including the electrostatic 2-D MEMS scanner and an aspherical objective lens. Waterproof packaging of the scanning head is accomplished. The MEMS scanner and the objective lens in the head are assembled precisely and compactly. The MEMS scanner has a gimbal structure and the mirror flatness and Q factor are controlled by a stress-controlled silicon nitride. The scan angle of 12deg., the mirror flatness of 80nm(PV) and the mirror reflectance of over 85% are achieved. The diameter and length of the scanning head are 3.3mm and 8mm, respectively and it can insert into a channel of the endoscope. The lateral resolution of 0.5um, the depth resolution of 2.9um, the field of view of 100*75um and over 20/s of frame rate needed for the in-vivo inspection was achieved.

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Section: Introductionmentioning

confidence: 99%

A miniature confocal optical scanning microscope for endoscopes

Murakami

2005

SPIE Proceedings

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“…Microelectromechanical (MEMS) mirrors can actively steer light beams. They play an important role in various optical systems and have been widely used in displays [1,2,3], optical switching [4,5,6], Fourier transform spectroscopy [7,8], optical endomicroscopy [9,10,11,12,13,14], tunable lasers [15,16], structured illumination [17], and light detection and ranging (LiDAR) [18,19]. The development of MEMS mirrors dates back to 1980 when Dr. Kurt Petersen published a seminal paper on a torsional mirror using silicon as the mechanical material [20].…”

Section: Introductionmentioning

confidence: 99%

An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability

2019

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This paper presents the design, fabrication, and characterization of an electrothermal MEMS mirror with large tip, tilt and piston scan. This MEMS mirror is based on electrothermal bimorph actuation with Cu and W thin-film layers forming the bimorphs. The MEMS mirror is fabricated via a combination of surface and bulk micromachining. The piston displacement and tip-tilt optical angle of the mirror plate of the fabricated MEMS mirror are around 114 μm and ±8°, respectively at only 2.35 V. The measured response time is 7.3 ms. The piston and tip-tilt resonant frequencies are measured to be 1.5 kHz and 2.7 kHz, respectively. The MEMS mirror survived 220 billion scanning cycles with little change of its scanning characteristics, indicating that the MEMS mirror is stable and reliable.

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“…Fiber scanning has been performed using piezo-electric devices [19][20][21][22] or a balanced tuning fork and lever approach [23]. Micro-electro-mechanical systems (MEMS) mirrors have been demonstrated for beam steering in confocal microscopy [24][25][26][27][28] and in OCT [29][30][31][32][33][34][35][36]. Most fiber scanning approaches require resonant scanning in order to generate sufficient deflection for a reasonable field of view.…”

Section: Introductionmentioning

confidence: 99%

Two-axis MEMS Scanning Catheter for Ultrahigh Resolution Three-dimensional and En Face Imaging

Aguirre¹,

Hertz²,

Chen³

et al. 2007

Opt. Express

114

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Ultrahigh resolution two and three-dimensional optical coherence tomography (OCT) imaging was performed using a miniaturized, two-axis scanning catheter based upon microelectromechanical systems (MEMS) mirror technology. The catheter incorporated a custom-designed and fabricated, 1-mm diameter MEMS mirror driven by angular vertical comb (AVC) actuators on both an inner mirror axis and an outer, orthogonal gimbal axis. Using a differential drive scheme, a linearized position response over +/- 6 degrees mechanical angle was achieved. The flexible, fiber-optic catheter device measured < 5 mm in outer diameter with a rigid length of ~ 2.5 cm at the distal end. In vivo and ex vivo images are presented with < 4 microm axial and ~ 12 microm transverse resolution in tissue.

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A MEMS Non-interferometric Differential Confocal Scanning Optical Microscope

Cited by 11 publications

References 10 publications

A miniature confocal optical scanning microscope for endoscopes

A miniature confocal optical scanning microscope for endoscopes

An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability

Two-axis MEMS Scanning Catheter for Ultrahigh Resolution Three-dimensional and En Face Imaging

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