A MEMS Position Encoder for Comb-Drive Actuators Using Suspended Gate Field-Effect Transistors

Lin, Tung Wei; Hou, Max Ti-Kuang; Chen, Rong Shun

doi:10.4028/0-87849-415-4.1379

Search citation statements

Order By: Relevance

Paper Sections

Select...

Introduction1

Citation Types

Supporting

Mentioning

Contrasting

Year Published

2011

2020

Publication Types

Select...

Article1

Other1

Relationship

Self Cite0

Independent2

Authors

Journals

Cited by 2 publications

(1 citation statement)

References 0 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The field-effect sensing with a laterally movable gate can obtain large travel range, but its usage is limited due to low resolution. 10,11 In this paper, we proposed a Vernier-type displacement sensor using suspended gate field-effect transistors (FETs) for comb-drive actuator to achieve a high resolution measurement. A Vernier caliper is a measuring instrument which consists of a stationary scale (main scale) and a movable scale (Vernier scale).…”

Section: Introductionmentioning

confidence: 99%

High-resolution microfabricated Vernier-type displacement sensor using suspended gate field-effect transistors

Hou

2011

J. Micro/Nanolith. MEMS MOEMS

View full text Add to dashboard Cite

In this paper, a high resolution Vernier-type displacement sensing mechanism is proposed by utilizing Vernier-type suspended gate field-effect transistors (SGFETs), The field-effect transistor benefits from its linear output signal and simple structure, and the concept of Vernier gate is used to enhance the resolution. The displacement of the comb-drive actuator is sensed via the output drain current of SGFET. Design and analysis for Vernier-type suspended gate were presented and some characteristics of the Vernier-type SGFETs were also discussed in simulation results. C 2011 Society of Photo-Optical Instrumentation Engineers (SPIE).

show abstract

Section: Introductionmentioning

confidence: 99%