A Method for Evaluating the Electro-Mechanical Characteristics of Piezoelectric Actuators during Motion

Jin, Tao; Takita, Akihiro; Djamal, Mitra; Hou, Wenmei; Jia, Hongzhi; Fujii, Yusaku

doi:10.3390/s120911559

Cited by 7 publications

(6 citation statements)

References 23 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…A significant part of the electric energy seems to be lost due to the source-load impedance mismatch at 600 Hz, which is very far from equality, the condition for maximum power transfer. The low conversion efficiency of piezoelectric materials also contributes to these final results that are similar to others [21,22].…”

Section: Pz Energy Studysupporting

confidence: 83%

“…The mechanical power was computed as the sum of the power of each pixel, as seen in Figure 7: = ∑ V where and V are acceleration and velocity, respectively, directly derived from the corresponding Doppler frequencies, and is the mass of the vibrating pixel, estimated from its dimensions and from the physical properties of the disc [21]. A total mechanical power of 6.01 × 10 −6 W was computed.…”

Section: Pz Energy Studymentioning

confidence: 99%

See 1 more Smart Citation

Submicron Surface Vibration Profiling Using Doppler Self-Mixing Techniques

et al. 2014

View full text Add to dashboard Cite

Doppler self-mixing laser probing techniques are often used for vibration measurement with very high accuracy. A novel optoelectronic probe solution is proposed, based on off-the-shelf components, with a direct reflection optical scheme for contactless characterization of the target's movement. This probe was tested with two test bench apparatus that enhance its precision performance, with a linear actuator at low frequency (35 m, 5-60 Hz), and its dynamics, with disc shaped transducers for small amplitude and high frequency (0.6 m, 100-2500 Hz). The results, obtained from well-established signal processing methods for self-mixing Doppler signals, allowed the evaluation of vibration velocity and amplitudes with an average error of less than 10%. The impedance spectrum of piezoelectric (PZ) disc target revealed a maximum of impedance (around 1 kHz) for minimal Doppler shift. A bidimensional scan over the PZ disc surface allowed the categorization of the vibration mode (0, 1) and explained its deflection directions. The feasibility of a laser vibrometer based on self-mixing principles and supported by tailored electronics able to accurately measure submicron displacements was, thus, successfully demonstrated.

show abstract

Section: Pz Energy Studysupporting

confidence: 83%

Section: Pz Energy Studymentioning

confidence: 99%

Submicron Surface Vibration Profiling Using Doppler Self-Mixing Techniques

et al. 2014

View full text Add to dashboard Cite

show abstract

“…The red trace refers to the interferometric signal collected for increasing voltage (thus, in the half-period of the triangle wave exhibiting positive slope, d V /d t > 0) whereas the black dashed trace is for decreasing voltage (thus, in the half-period of the triangle wave exhibiting negative slope, d V /d t < 0). Hysteresis in the position assumed by the micro-membrane for increasing and decreasing voltages, as expected for piezo-electric actuation [25,26,27], is highlighted by this plot as the fringes for d V /d t > 0 are not superposed to the fringes detected for d V /d t < 0. The displacement was finally reconstructed as a function of the instantaneous value of the piezo-actuator driving voltage by fringe counting with a λ/8 = 165 nm resolution, that is by detecting the voltage corresponding to all the maxima, minima and zero crossings of the interferometric signal.…”

Section: Resultsmentioning

confidence: 92%

Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry

Merlo

Crisà

et al. 2017

Sensors

View full text Add to dashboard Cite

In this work, we have applied optical low-coherence reflectometry (OLCR), implemented with infra-red light propagating in fiberoptic paths, to perform static and dynamic analyses on piezo-actuated glass micro-membranes. The actuator was fabricated by means of thin-film piezoelectric MEMS technology and was employed for modifying the micro-membrane curvature, in view of its application in micro-optic devices, such as variable focus micro-lenses. We are here showing that OLCR incorporating a near-infrared superluminescent light emitting diode as the read-out source is suitable for measuring various parameters such as the micro-membrane optical path-length, the membrane displacement as a function of the applied voltage (yielding the piezo-actuator hysteresis) as well as the resonance curve of the fundamental vibration mode. The use of an optical source with short coherence-time allows performing interferometric measurements without spurious resonance effects due to multiple parallel interfaces of highly planar slabs, furthermore selecting the plane/layer to be monitored. We demonstrate that the same compact and flexible setup can be successfully employed to perform spot optical measurements for static and dynamic characterization of piezo-MEMS in real time.

show abstract

“…Various methods for modeling and identifiying piezo systems have been investigated [20–23 ]. In order to design a robust optimal H ∞ controller, time-invariant linear dynamics are used to represent the main dynamics of the PZT stacks.…”

Section: Control System Designmentioning

confidence: 99%

Ultra-Precision Measurement and Control of Angle Motion in Piezo-Based Platforms Using Strain Gauge Sensors and a Robust Composite Controller

Liu

Bai

Zhang

et al. 2013

Sensors

View full text Add to dashboard Cite

Abstract:The measurement and control strategy of a piezo-based platform by using strain gauge sensors (SGS) and a robust composite controller is investigated in this paper. First, the experimental setup is constructed by using a piezo-based platform, SGS sensors, an AD5435 platform and two voltage amplifiers. Then, the measurement strategy to measure the tip/tilt angles accurately in the order of sub-μrad is presented. A comprehensive composite control strategy design to enhance the tracking accuracy with a novel driving principle is also proposed. Finally, an experiment is presented to validate the measurement and control strategy. The experimental results demonstrate that the proposed measurement and control strategy provides accurate angle motion with a root mean square (RMS) error of 0.21 μrad, which is approximately equal to the noise level.

show abstract

A Method for Evaluating the Electro-Mechanical Characteristics of Piezoelectric Actuators during Motion

Cited by 7 publications

References 23 publications

Submicron Surface Vibration Profiling Using Doppler Self-Mixing Techniques

Submicron Surface Vibration Profiling Using Doppler Self-Mixing Techniques

Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry

Ultra-Precision Measurement and Control of Angle Motion in Piezo-Based Platforms Using Strain Gauge Sensors and a Robust Composite Controller

Contact Info

Product

Resources

About