Ultra-Precision Measurement and Control of Angle Motion in Piezo-Based Platforms Using Strain Gauge Sensors and a Robust Composite Controller

Abstract

Abstract:The measurement and control strategy of a piezo-based platform by using strain gauge sensors (SGS) and a robust composite controller is investigated in this paper. First, the experimental setup is constructed by using a piezo-based platform, SGS sensors, an AD5435 platform and two voltage amplifiers. Then, the measurement strategy to measure the tip/tilt angles accurately in the order of sub-μrad is presented. A comprehensive composite control strategy design to enhance the tracking accuracy with a novel driving principle is also proposed. Finally, an experiment is presented to validate the measurement and control strategy. The experimental results demonstrate that the proposed measurement and control strategy provides accurate angle motion with a root mean square (RMS) error of 0.21 μrad, which is approximately equal to the noise level.

A New Payload Swing Angle Sensing Device and Its Accuracy

“…In [ 18 ], a miniature strain gauge is placed inside a loaded O-ring seal, in [ 19 ] a special strain gauge is designed for placement on human skin. As in our case, strain gauges are used as measuring elements in connection with automatic control, as evidenced by publications [ 11 , 12 ]. Specifically, in connection with the measurement of the angle of rotation, the strain gauge is used as a measuring element in [ 12 ].…”

“…As in our case, strain gauges are used as measuring elements in connection with automatic control, as evidenced by publications [ 11 , 12 ]. Specifically, in connection with the measurement of the angle of rotation, the strain gauge is used as a measuring element in [ 12 ]. Progressive methods include the placement of strain gauges in networks, as reported in [ 20 ].…”

“…The Wheatstone Bridge, in most cases, is part of a transducer. The Wheatstone bridge and the principle of its operation in cooperation with strain gauges is also mentioned in modern publications [ 11 , 12 , 13 , 14 ]. Too large an electric current must not pass through the strain gauges in the bridge so that they do not heat up and do not change their resistance properties.…”

Note: A piezo tip/tilt platform: Structure, kinematics, and experiments

“…1,2 In recent studies, there are mainly two types of PT 2 Ps: the three-piezoelectric-stack-driven PT 2 Ps, [3][4][5] which are capable to provide necessary actuations for tip/tilt motions with lower costs, and the four-piezoelectric-stack-driven PT 2 Ps, [6][7][8] which have better stabilities by applying differential designs but need sophisticated control methods. In this note, we present a four-piezoelectric-stack-driven PT 2 P with its structure, kinematics, and preliminary experiments.…”

Modeling of Hysteresis in Piezoelectric Actuator Based on Segment Similarity

“…Since piezoelectric actuators (PZAs) have the advantages of fast response, high displacement resolution, small size, and simple construction, they are widely used in diverse precision positioning applications at the micro/nano scale, such as optical fiber alignment [1], medical micromanipulator [2], micromachining [3,4], and vibration control [5]. However, the hysteresis behavior of PZAs restricts the usefulness of these actuators in precision manipulation applications.…”