A method for measuring the complex refractive index and thickness of a thin metal film

Chen, K.H.; Hsu, Chang-Hong; Su, Der Chin

doi:10.1007/s00340-003-1292-6

Cited by 17 publications

(12 citation statements)

References 13 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…There are many methods [9][10][11][12][31][32][33][34][35][36][37][38][39][40] can determine those factors, most popular method is ellipsometer [9][10][11][12]. Recently, these factors can be obtained by heterodyne interferometer.…”

Section: Optical Constants Measurement With Heterodyne Interferometermentioning

confidence: 99%

“…Recently, these factors can be obtained by heterodyne interferometer. In this section, we will review some novel methods [31][32][33][34][35][36][37][38][39][40] for optical constants measurement with heterodyne interferometer.…”

Section: Optical Constants Measurement With Heterodyne Interferometermentioning

confidence: 99%

“…For the measurement of the optical constants of the thin film, K. H. Chen and C. C. Hsu [33] proposed a circular heterodyne refractometer. The optical configuration was shown in figure 18.…”

Section: Optical Constants Measurement With Heterodyne Interferometermentioning

confidence: 99%

See 2 more Smart Citations

The Applications of the Heterodyne Interferoemetry

Hsu¹

2012

Interferometry - Research and Applications in Science and Technology

View full text Add to dashboard Cite

Section: Optical Constants Measurement With Heterodyne Interferometermentioning

confidence: 99%

Section: Optical Constants Measurement With Heterodyne Interferometermentioning

confidence: 99%

See 1 more Smart Citation

The Applications of the Heterodyne Interferoemetry

Hsu¹

2012

Interferometry - Research and Applications in Science and Technology

View full text Add to dashboard Cite

“…These are multiple wavelength ellipsometry [4], the prism coupling technique [5], the envelope method [6], spectrophotometry [7], and others. Among them spectrophotometry measuring the transmission in a wide spectral range and using dispersion relations seems to be the most reliable technique for optical constant measurement.…”

Section: Introductionmentioning

confidence: 99%

Optical properties of thin epitaxial Ba0.8Sr0.2TiO3 films

2012

View full text Add to dashboard Cite

The properties of nanodimensional (Ba 0.8 , Sr 0.2 )TiO 3 films on single crystal magnesia substrates are studied. The films are applied by rf sputtering and grow in the layer by layer mode. The lattice parameters are measured by the X ray diffraction method. The transmission of the films with different thicknesses is stud ied in the wavelength range 190-1100 nm. When analyzing experimental optical parameters, additional relaxation parameters depicting a final lifetime of the oscillator are used to characterize the refractive index and absorption factor in the dispersion relation. Such an approach allows a more accurate approximation of experimental data.

show abstract

“…Among them, ellipsometry which has been used to study thin film properties for more than a century is still a viable technique today [6][7][8][9][10][11]. It is highly effective and nondestructive for thickness and refractive index measurements.…”

Section: Introductionmentioning

confidence: 99%

Validiation of Photometric Ellipsometry for Refractive Index and Thickness Measurements

Srisuwan

Sirisathitkul

Danworaphong

2014

MAPAN

View full text Add to dashboard Cite

We design and build a photometric ellipsometer that can be adjusted or modified to match specific needs for different experiments. To validate our setup, we test the system with glass substrates at multiple incident angles from 30°to 70°. The experimental data can then be fitted to the standard theoretical model for ellipsometry with a single interface, allowing the amplitude ratio (tan W) and the phase difference (D) to be evaluated as fitting parameters. As a result, we obtain the refractive indices of glass as 1.44-1.55 depending on the backing material. By the same means, it is also feasible to derive thicknesses of silicon oxide films. The resulting thicknesses are in good agreement with those determined by a commercial ellipsometer with the minimum deviation of 0.2 %.

show abstract

A method for measuring the complex refractive index and thickness of a thin metal film

Cited by 17 publications

References 13 publications

The Applications of the Heterodyne Interferoemetry

The Applications of the Heterodyne Interferoemetry

Optical properties of thin epitaxial Ba0.8Sr0.2TiO3 films

Validiation of Photometric Ellipsometry for Refractive Index and Thickness Measurements

Contact Info

Product

Resources

About