Abstract:The position error of two parallel surfaces is generally constrained by parallelism. However, as a range of change, it cannot represent the positional relation between two parallel surfaces. Large-scale equipment such as machine tools are complex and difficult to move. It is also an engineering problem to perform field measurements on it. To this end, a method of describing the positional relation between two horizontal parallel surfaces and two vertical parallel surfaces on-site is proposed in this paper, whi… Show more
“…Using a combination of a laser interferometer and white light interference, the practical positioning method in end-plate surface distance measurement can achieve nanometer-scale precision [1]. Using a combination of laser triangulation sensors and a contact probe, not only the distance of two parallel surfaces but also the difference between surface shape contours can be measured to micrometer-scale accuracy [2]. With a multi-path laser interferometer, a new computational model for step gauge calibration was proposed based on synthesis technology [3], and a differential quadrature Fabry-Pérot interferometer was proposed separately [4].…”
Metrology is the science of measurement and can be divided into three overlapping activities: (1) the definition of units of measurement, (2) the realization of units of measurement, and (3) the traceability of measurement units [...]
“…Using a combination of a laser interferometer and white light interference, the practical positioning method in end-plate surface distance measurement can achieve nanometer-scale precision [1]. Using a combination of laser triangulation sensors and a contact probe, not only the distance of two parallel surfaces but also the difference between surface shape contours can be measured to micrometer-scale accuracy [2]. With a multi-path laser interferometer, a new computational model for step gauge calibration was proposed based on synthesis technology [3], and a differential quadrature Fabry-Pérot interferometer was proposed separately [4].…”
Metrology is the science of measurement and can be divided into three overlapping activities: (1) the definition of units of measurement, (2) the realization of units of measurement, and (3) the traceability of measurement units [...]
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