1988
DOI: 10.1143/jjap.27.l2361
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A Method of Quantitative Contamination with Metallic Impurities of the Surface of a Silicon Wafer

Abstract: Pancreatic cancer is frequently associated with intense growth of fibrous tissue at the periphery of tumours, but the histopathological quantification of this stromal reaction has not yet been used as a prognostic factor because of the difficulty of obtaining quantitative measures using manual methods. Manual histological grading is a poor indicator of outcome in this type of cancer and there is a clinical need to establish a more sensitive indicator. Recent pancreatic tumour biology research has focused upon … Show more

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Cited by 125 publications
(51 citation statements)
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“…32 Core electrons are represented by normconserving pseudopotentials using the Troullier-Martins parametrization and including scalar relativistic corrections. The pseudopotential for the silicon atom was generated in the electron configuration ͓Ne͔3s 2 3p 2 , for oxygen in ͓1s 2 ͔2s 2 2p 4 , for copper in ͓Ar͔4s 1 3d 10 , and for hydrogen in 1s 1 , with the square brackets denoting the core electron configurations. After extensive testing of different basis sets, we used double zeta with a single shell of polarization orbitals for Si and H, double zeta with two shells of polarization orbitals for oxygen, and triple zeta with two shells of polarization orbitals for copper.…”
Section: A Calculation Methodologymentioning
confidence: 99%
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“…32 Core electrons are represented by normconserving pseudopotentials using the Troullier-Martins parametrization and including scalar relativistic corrections. The pseudopotential for the silicon atom was generated in the electron configuration ͓Ne͔3s 2 3p 2 , for oxygen in ͓1s 2 ͔2s 2 2p 4 , for copper in ͓Ar͔4s 1 3d 10 , and for hydrogen in 1s 1 , with the square brackets denoting the core electron configurations. After extensive testing of different basis sets, we used double zeta with a single shell of polarization orbitals for Si and H, double zeta with two shells of polarization orbitals for oxygen, and triple zeta with two shells of polarization orbitals for copper.…”
Section: A Calculation Methodologymentioning
confidence: 99%
“…Amongst the most common metal impurities, copper has been shown to be much more damaging to electrical properties than, for example, aluminium, iron, or nickel. 1,2 Copper is introduced as a contaminant in several ways, depending on the processing route. Most recently, the adoption of copper as the interconnect material in ultralarge scale integrated devices means that copper can diffuse directly into and through silicon.…”
Section: Introductionmentioning
confidence: 99%
“…1 and 2 were induced through droplets of 1, 5 and 20 ppb% (w/v) copper solution [10]. The higher surface contamination levels were achieved by spin coating the front surface with 8 and 100 ppm% (w/v) of copper solution [11]. The wafers were subsequently annealed for 20 min at 800 °C in a nitrogen atmosphere in order to diffuse the copper contamination into the wafer bulk.…”
Section: Methodsmentioning
confidence: 99%
“…[1][2][3][4] When the sample to be analyzed is a solution, it is changed to the solid film on a sample-carrier by the micro-drop method. 5,6) Hence, the preparation of analytical samples and the calibration of observed data are very important in the TXRF analysis of solution samples. If the matrix of a sample solution remains in the solid film, the background and the detector counting-loss possibly increase.…”
Section: Introductionmentioning
confidence: 99%