A method to improve the quality of 2.5 dimensional micro-and nano-structures produced by focused ion beam machining

Felicis, Daniele De; Mughal, Muhammad Zeeshan; Bemporad, Edoardo

doi:10.1016/j.micron.2017.05.005

Cited by 18 publications

(12 citation statements)

References 22 publications

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“…In the last few years, a novel high-speed nanoindentation [41,104] fabricated by FIB machining [114]. In this specific case, the geometrical features were select with the sole purpose of demonstrating the spatial resolution achievable by FIB milling of a diamond indenter.…”

Section: Next Generation Nanoindentation Techniques For Fast and Highmentioning

confidence: 99%

Metrology and nano-mechanical tests for nano-manufacturing and nano-bio interface: Challenges & future perspectives

et al. 2018

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Nanometrology refers to measurement techniques that assess materials properties at the nanoscale. Laboratory-based characterisation of nanomaterials has been the key enabler in the growth of nanotechnology and nano-enabled products. Due to the small size involved, dimensional measurements has dominated such characterisation underpinned by a tremendous development in stand-alone electron/ion microscopes and scanning probe microscopes. However, the scope of nanometrology extends far beyond off-site, laboratory-based measurements of dimensions only, and is expected to have a tremendous impact on design of nano-enabled materials and devices. In this article, we discuss some of the available techniques for laboratory-based characterisation of mechanical and interfacial properties for nanometrology. We also provide a deep insight into the emerging techniques in measuring these properties, keeping in view the need in advanced manufacturing and nanobio-interactions to develop multifunctional instrumentation, traceable and standardized methods, and modelling tools for unambiguous data interpretation. We also discuss the evaluation of nanomechanical properties and surface/interface response of materials, within the purview of manufacturing processes and standardization. Finally, we discuss scientific and technological challenges that are required to move towards real-time nano-characterisation for rapid, reliable, repeatable and predictive metrology to underpin upscaling nanomaterials and nano-enabled products from the research field to industry and market

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Section: Next Generation Nanoindentation Techniques For Fast and Highmentioning

confidence: 99%

Metrology and nano-mechanical tests for nano-manufacturing and nano-bio interface: Challenges & future perspectives

et al. 2018

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“…These techniques have their own advantages and disadvantages such as high efficiency, resolution limit, complex steps, costly equipment, and material dependence [5][6][7][8]. Focused ion beam (FIB) milling combined with electron column (dualbeam system) a powerful technique for fabricating microand nano-structures (ranging from sub-50 nm to several tens of microns in size) with a high patterning flexibility on almost any material [9][10][11][12]. The technique has the distinctive advantage of direct writing with the ability to control pixel by the ion dose (dwell time), hence permitting to produce 3D patterns with relatively high aspect ratio and without the use of additional masks and resists [13,14].…”

Section: Introductionmentioning

confidence: 99%

“…The recent generation of FIB instruments allows importing a bitmap file as a pattern to machine microstructures. The bitmap method has become increasingly popular and is currently the most commonly used processing method in FIB milling due to the convenience of usage [12,13,[20][21][22]. In the bitmap files, the milling area, beam scan routes, beam overlap ratio, and dwell time can be defined after the ion beam voltages and currents are determined.…”

Section: Introductionmentioning

confidence: 99%

Formation mechanism and compensation methods of profile error in focused ion beam milling of three-dimensional optical microstructures

et al. 2020

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The formation mechanism and compensation methods of the profile error in focused ion beam (FIB) bitmap milling of three-dimensional (3D) optical microstructure are studied in this paper. The processing parameters such as ion beam currents, dwell times, and beam overlap ratios on the profile error have an optimized parameters combination of 21 nA, 10 μs, and 50%, and the shape accuracy processed under the conditions is 0.44 μm of P-V and 0.142 μm of RMS, respectively. Inappropriate processing parameters lower either shape accuracy or processing efficiency. By means of an accurate simulation model of the FIB machined 3D profiles, the intrinsic formation mechanism of the profile error can be attributed to ion beam diameters, redeposition effect, and sputter yields, and these factors are inevitable in FIB milling of 3D microstructures. In situ modification and iterative optimization are proposed to compensate the FIB milling error, which both can improve the shape accuracy more than 50%. The in situ modification method needs to load the original bitmap and modified bitmap separately, which is less convenient than the iterative optimization method that only need loading one bitmap file. However, the in situ modification is better than the iterative optimization at decreasing the RMS value of the profile error which indicates the global profiles error of the processed microstructures.

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“…An obvious step forward in this respect was the derivation of geometries from CAD models, demonstrated in Refs. [9,10,13,14] to allow easier, more advanced and more reproducible design of micro-and nano-components. Velkova et al [9] and Lalev et al [10] created stream files based on coordinates in stereolithography (STL) format files, which can commonly be exported from components of a CAD model.…”

Section: Introductionmentioning

confidence: 99%

“…While this approach constitutes an improvement compared to bitmap-based machining, it is limited to the same horizontal scanning strategy and does thus not employ the potential of stream files of customizing the beam path. This shortcoming was addressed in recent work by De Felicis et al [13], who imported coordinates from a mesh of a 3D component of a CAD model, calculated dwell-times by a node down-sampling approach and applied a custom scanning strategy aimed at minimizing beam blanking operations and tracing the contours of the final geometry. They demonstrated that the derivation of geometries from CAD and optimization of the FIB machining strategy are a promising path towards machining complex geometries at high spatial resolution.…”

Section: Introductionmentioning

confidence: 99%

Computer-aided manufacturing and focused ion beam technology enable machining of complex micro- and nano-structures

Nießen

Nancarrow

2019

Nanotechnology

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Computer-aided manufacturing and focused ion beam technology enable Computer-aided manufacturing and focused ion beam technology enable machining of complex micro-and nano-structures machining of complex micro-and nano-structures Abstract AbstractWe present a novel framework for the fabrication of geometrically complex structures at the micro-and nano-scale which relies on the synergy of integrated computer-aided design and manufacturing systems (CAD/CAM) and focused ion beam (FIB) technology in a scanning electron microscope. Here we utilise industry standard G-code syntax, for the first time, to FIB machining by designing geometries with CAD, defining machining strategies and exporting G-codes with CAM and generating a coordinate list-based beam path by using a custom-built interpreter program. This allows the fabrication of complex structures from CAD models using syntax which is readily understood in the general fabrication industry. The use of G-code allows optimization of the beam path towards a reduction of beam blanking operations and tracing of contours, leading to minimized re-deposition of material. We give a detailed description of the method, use an application example to demonstrate advantages and prospects of the approach and provide the free and open-source interpreter program CAM2FIB for application of this method. We contrast and compare various existing available milling strategies and demonstrate the versatility of Gcode based programming. Disciplines DisciplinesEngineering | Physical Sciences and Mathematics Publication Details Publication Details Niessen, F. & Nancarrow, M. J. B. (2019). Computer-aided manufacturing and focused ion beam technology enable machining of complex micro-and nano-structures. Nanotechnology, 30 (43), 435301-1-435301-11. AbstractWe present a novel framework for the fabrication of geometrically complex structures at the microand nano-scale which relies on the synergy of integrated computer-aided design and manufacturing systems (CAD/CAM) and focused ion beam (FIB) technology in a scanning electron microscope. Here we utilise industry standard G-code syntax, for the first time, to FIB machining by designing geometries with CAD, defining machining strategies and exporting G-codes with CAM and generating a coordinate list-based beam path by using a custom-built interpreter program. This allows the fabrication of complex structures from CAD models using syntax which is readily understood in the general fabrication industry. The use of G-code allows optimization of the beam path towards a reduction of beam blanking operations and tracing of contours, leading to minimized re-deposition of material. We give a detailed description of the method, use an application example to demonstrate advantages and prospects of the approach and provide the free and open-source interpreter program CAM2FIB for application of this method. We contrast and compare various existing available milling strategies and demonstrate the versatility of G-code based programming.

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A method to improve the quality of 2.5 dimensional micro-and nano-structures produced by focused ion beam machining

Cited by 18 publications

References 22 publications

Metrology and nano-mechanical tests for nano-manufacturing and nano-bio interface: Challenges & future perspectives

Metrology and nano-mechanical tests for nano-manufacturing and nano-bio interface: Challenges & future perspectives

Formation mechanism and compensation methods of profile error in focused ion beam milling of three-dimensional optical microstructures

Computer-aided manufacturing and focused ion beam technology enable machining of complex micro- and nano-structures

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