A micro-electro-mechanical accelerometer based on gallium nitride on silicon

Morelle, Christophe; Théron, D.; Roch‐Jeune, Isabelle; Tilmant, Pascal; Okada, Étienne; Vaurette, Francois; Grimbert, B.; Derluyn, Joff; Degroote, Stefan; Germain, Marianne; Faucher, M.

doi:10.1063/5.0127987

Cited by 3 publications

(2 citation statements)

References 25 publications

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“…Assessment of the accuracy of charge-mode accelerometers is extremely important in areas such as mechanical science [1], navigation [2], medicine [3] and geotechnics [4], particularly because they can be used over a wide temperature range [5]. In everyday engineering practice, the accuracy of this type of accelerometer is assessed by way of calibration, by comparing its charge sensitivity with the corresponding reference values [6,7].…”

Section: Introductionmentioning

confidence: 99%

Accuracy Assessment of Charge-Mode Accelerometers Using Multivariate Regression of the Upper Bound of the Dynamic Error

Tomczyk,

Kowalczyk

2023

Energies

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This paper presents the mathematical basis and related procedures for the regression of the upper bound of the dynamic error produced by charge-mode accelerometers. The integral-square error obtained in response to simulation signals with one constraint appearing at the input of the accelerometer is considered. Physical models of accelerometers are presented with related equations and mathematical formulae that make it possible to obtain the error and the corresponding constrained signal. Examples of the regression for predefined values of the accelerometer parameters are also discussed. The solutions presented in this paper may contribute to increasing the accuracy of the charge-mode accelerometers commonly used in energy systems. Development of the functions approximating the integral-square error for the given ranges of accelerometer parameters constitutes the original contribution of this paper.

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Section: Introductionmentioning

confidence: 99%

Accuracy Assessment of Charge-Mode Accelerometers Using Multivariate Regression of the Upper Bound of the Dynamic Error

Tomczyk,

Kowalczyk

2023

Energies

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“…Microresonators, intentionally designed for miniaturization, have proven to be indispensable across various fields. Notably, they find applications in frequency filtering within communication systems [1,2], act as sensing elements in atomic force microscopy [3], and serve as accelerometers [4]. Additionally, the unique properties of piezoelectric materials, such as nano-scale resolution, robustness, and fast response rate [5], make them well-suited for precision machining [6,7] and nano-positioning actuators [8,9].…”

Section: Introductionmentioning

confidence: 99%

Modeling of Magnetoelectric Microresonator Using Numerical Method and Simulated Annealing Algorithm

Sadeghi,

Bazrafkan,

Rutner

et al. 2023

Micromachines

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A comprehensive understanding of the linear/nonlinear dynamic behavior of wireless microresonators is essential for micro-electromechanical systems (MEMS) design optimization. This study investigates the dynamic behaviour of a magnetoelectric (ME) microresonator, using a finite element method (FEM) and machine learning algorithm. First, the linear/nonlinear behaviour of a fabricated thin-film ME microactuator is assessed in both the time domain and frequency spectrum. Next, a data driven system identification (DDSI) procedure and simulated annealing (SA) method are implemented to reconstruct differential equations from measured datasets. The Duffing equation is employed to replicate the dynamic behavior of the ME microactuator. The Duffing coefficients such as mass, stiffness, damping, force amplitude, and excitation frequency are considered as input parameters. Meanwhile, the microactuator displacement is taken as the output parameter, which is measured experimentally via a laser Doppler vibrometer (LDV) device. To determine the optimal range and step size for input parameters, the sensitivity analysis is conducted using Latin hypercube sampling (LHS). The peak index matching (PIM) and correlation coefficient (CC) are considered assessment criteria for the objective function. The data-driven developed models are subsequently employed to reconstruct/predict mode shapes and the vibration amplitude over the time domain. The effect of driving signal nonlinearity and total harmonic distortion (THD) is explored experimentally under resonance and sub-resonance conditions. The vibration measurements reveal that as excitation levels increase, hysteresis variations become more noticeable, which may result in a higher prediction error in the Duffing array model. The verification test indicates that the first bending mode reconstructs reasonably with a prediction accuracy of about 92 percent. This proof-of-concept study demonstrates that the simulated annealing approach is a promising tool for modeling the dynamic behavior of MEMS systems, making it a strong candidate for real-world applications.

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Research on adjustable measuring range vibration sensors based on optical fiber tweezers

Liu,

Sui,

Chen

et al. 2025

Measurement

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A micro-electro-mechanical accelerometer based on gallium nitride on silicon

Cited by 3 publications

References 25 publications

Accuracy Assessment of Charge-Mode Accelerometers Using Multivariate Regression of the Upper Bound of the Dynamic Error

Accuracy Assessment of Charge-Mode Accelerometers Using Multivariate Regression of the Upper Bound of the Dynamic Error

Modeling of Magnetoelectric Microresonator Using Numerical Method and Simulated Annealing Algorithm

Research on adjustable measuring range vibration sensors based on optical fiber tweezers

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