2011
DOI: 10.1016/j.aca.2010.12.039
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A micro gas preconcentrator with improved performance for pollution monitoring and explosives detection

Abstract: This paper presents the optimization of a micro gas preconcentrator based on a micro-channel in porous and non-porous silicon filled with an adequate adsorbent. This micro gas preconcentrator is both applicable in the fields of atmospheric pollution monitoring (Volatil Organic Compounds-VOCs) and explosives detection (nitroaromatic compounds). Different designs of micro-devices and adsorbent materials have been investigated since these two parameters are of importance in the performances of the microdevice. Th… Show more

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Cited by 72 publications
(60 citation statements)
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“…Microchannels are then sealed with a glass cap on which are fixed the metallic capillaries used as fluidic connection. Compared to our previous designs [1,2], the interest of having the fluidic connections on the glass cover is that there is no limitation on the capillary size since inlet/outlet are not dipped into the silicon wafer (Fig.1b). Our micro-devices include also a platinum micro-heater patterned on the backside by clean-room process (Lift-off).…”
Section: Design and Fabricationmentioning
confidence: 97%
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“…Microchannels are then sealed with a glass cap on which are fixed the metallic capillaries used as fluidic connection. Compared to our previous designs [1,2], the interest of having the fluidic connections on the glass cover is that there is no limitation on the capillary size since inlet/outlet are not dipped into the silicon wafer (Fig.1b). Our micro-devices include also a platinum micro-heater patterned on the backside by clean-room process (Lift-off).…”
Section: Design and Fabricationmentioning
confidence: 97%
“…With these requirements in mind, the combination Carbopack-PS seems to be a very promising couple substrate-adsorbent. Indeed, as we have previously reported, PS allows reducing the desorption temperature of the couple adsorbent/adsorbed compound [1]. As a structural material, PS can be easily inserted into silicon micro-fluidic devices directly during their processing.…”
Section: Introductionmentioning
confidence: 93%
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