A micro-machined Tonpilz hydrophone for audible frequency sounds

Sung, Min Gyu; Lee, Hak Sue; Moon, Won

doi:10.1109/eftf-ifc.2013.6702193

Cited by 3 publications

(2 citation statements)

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“…The sound pressure sensitivity M H of the hydrophone to be measured is obtained and then the sound pressure sensitivity M H is converted into the sound pressure sensitivity level M dB using equation (11). The sound pressure sensitivity of the hydrophone in the frequency band from 500 Hz to 5000 Hz is measured by the free-field comparative calibration method using the device shown in Schematic figure 7.…”

Section: Hydrophones Experimental Verificationmentioning

confidence: 99%

“…Many scholars at home and abroad have carried out in-depth research on MEMS hydrophones [10]. In 2013, Sung et al designed the Tonpilz hydrophone based on MEMS technology with a sound pressure sensitivity of up to −200 dB in the operating bandwidth of 700 Hz ∼ 4000 Hz [11,12]. Although the fabrication of the Tonpilz hydrophone was successful, Some issues can be observed from their experimental processes and results.…”

Section: Introductionmentioning

confidence: 99%

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A MEMS piezoelectric hydrophone with high sensitivity and wide bandwidth

Liu,

Zhang,

Zhang

et al. 2024

Phys. Scr.

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To solve the problems of low sound pressure sensitivity and narrow operating bandwidth of hydrophones, this paper proposes a MEMS piezoelectric hydrophone with a corrugated structure substrate. This design is improved from two aspects, on the one hand, the MEMS technology is used to make the aluminum oxide substrate into a corrugated structure, the corrugated structure can make the hydrophone work with better linearity, and at the same time broaden the hydrophone's operating bandwidth; on the other hand, the array design is utilized to improve the sound pressure sensitivity by integrating four identical sensitive cores in the same piece of hydrophone. The test results show that the sound pressure sensitivity of the MEMS piezoelectric hydrophone of this design is better than -207.6 dB in the operating bandwidth of 10~3800 Hz, and reaches the highest -195.5 dB sound pressure sensitivity at the input signal frequency of 2500 Hz.

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Section: Hydrophones Experimental Verificationmentioning

confidence: 99%