A microchip laser feedback interferometer with nanometer resolution and increased measurement speed based on phase meter

Zhang, Song; Tan, Yidong; Ren, Zhaoyu; Zhang, Yongqin; Zhang, Shulian

doi:10.1007/s00340-013-5743-4

Cited by 9 publications

(8 citation statements)

References 24 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…A research focus of laser feedback technology applied in the displacement measurement field is the heterodyne microchip solid-state laser employing external frequency-shifted feedback. 38,39 As mentioned above, the relaxation oscillation phenomenon in solid-state lasers causes a highly sensitive response as large as 10 6 to the frequency-shifted laser feedback. The schematic diagram is shown in Fig.…”

Section: Displacement Measurementmentioning

confidence: 98%

“…The resolution of the frequency-shifted laser feedback interferometer is 1 nm by phase discrimination method, and the zero drift within 3 min is less than 8 nm. 39 The performance of the laser feedback frequency shift interferometer is calibrated, compared with the commercial dual-frequency laser interferometer Agilent 5529A. The correlation coefficient of the linear fit differs from 1 by 6 × 10 −4 , and the residual error is <1.5 μm.…”

Section: Displacement Measurementmentioning

confidence: 99%

“…The sensitivity is improved at the cost of a more complicated structure and increased expense. However, the measurement range is limited to about 1 m since the measurement process needs a proper feedback level, 39 and the method for determining the direction of displacement is difficult and complex to realize. Due to the fact that the common part of the measuring optical path and the referring optical path is limited, with the increasing measurement range, the accuracy will be affected.…”

Section: Displacement Measurementmentioning

confidence: 99%

See 2 more Smart Citations

Laser feedback interferometry and applications: a review

Niu

2017

Opt. Eng

View full text Add to dashboard Cite

The progress on laser feedback interferometry technology is reviewed. Laser feedback interferometry is a demonstration of interferometry technology applying a laser reflected from an external surface, which has features including simple structure, easy alignment, and high sensitivity. Theoretical analysis including the Lang-Kobayashi model and three-mirror model are conducted to explain the modulation of the laser output properties under the feedback effect. In particular, the effect of frequency and polarization shift feedback effects are analyzed and discussed. Various applications on various types of lasers are introduced. The application fields range from metrology, to physical quantities, to laser parameters and other applications. The typical applications of laser feedback technology in industrial and research fields are discussed. Laser feedback interferometry has great potential to be further exploited and applied.

show abstract

Section: Displacement Measurementmentioning

confidence: 98%

Section: Displacement Measurementmentioning

confidence: 99%

Section: Displacement Measurementmentioning

confidence: 99%

See 1 more Smart Citation

Laser feedback interferometry and applications: a review

Niu

2017

Opt. Eng

View full text Add to dashboard Cite

show abstract

“…[13], which limits the measuring speed to be 100 µm/s. Zhang and Ren [44] proposed a new signal processing method replacing the Lock-in to a phase meter, and the measuring speed is improved to 10 mm/s. Then, Zhang [45] improved the performance of the system by replacing the laser source with a Nd: YVO 4 crystal.…”

Section: Displacement Sensingmentioning

confidence: 99%

“…The experimental system is shown in Figure 12. The structure of the instrument belongs to the quasi-common-path laser feedback interferometer [44]. A hollow arm with a right-angled prism fixed on the edge is installed at the interface of the interferometer, turning the laser beam 90 degrees and adjusting it incident perpendicularly onto the liquid surface.…”

Section: Liquid Evaporation Rate Measurementmentioning

confidence: 99%

Frequency-Shifted Optical Feedback Measurement Technologies Using a Solid-State Microchip Laser

et al. 2018

Self Cite

View full text Add to dashboard Cite

Since its first application toward displacement measurements in the early-1960s, laser feedback interferometry has become a fast-developing precision measurement modality with many kinds of lasers. By employing the frequency-shifted optical feedback, microchip laser feedback interferometry has been widely researched due to its advantages of high sensitivity, simple structure, and easy alignment. More recently, the laser confocal feedback tomography has been proposed, which combines the high sensitivity of laser frequency-shifted feedback effect and the axial positioning ability of confocal microscopy. In this paper, the principles of a laser frequency-shifted optical feedback interferometer and laser confocal feedback tomography are briefly introduced. Then we describe their applications in various kinds of metrology regarding displacement measurement, vibration measurement, physical quantities measurement, imaging, profilometry, microstructure measurement, and so on. Finally, the existing challenges and promising future directions are discussed.

show abstract