A microelectromechanical-based magnetostrictive magnetometer

Osiander, Robert; Ecelberger, S. A.; Givens, R. B.; Wickenden, D. K.; Murphy, J. C.; Kistenmacher, Thomas J.

doi:10.1063/1.117327

Cited by 57 publications

(33 citation statements)

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“…We justify the of this theory, rather than the more complex Timoshenko theory, because the wavelength of vibration is much larger than the thickness of the beam. The differential equation governing the motion of a Bernoulli-Euler beam undergoing harmonic motion w(x,t) at a frequency w is given by EIwv + o2pAw = 0 (6) where I is the moment of inertia and A is the cross sectional area of the beam. The effects of the two springs and concentrated mass enter into the expressions for the boundary conditions.…”

Section: Modeling Studiesmentioning

confidence: 99%

<title>Polysilicon xylophone bar magnetometers</title>

et al. 1999

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The recently developed JHU/APL magnetometer, which is based on a free-free (xylophone) resonating bar, is simple, small, light weight, has a low power consumption and utilizes the Lorentz force to measure vector magnetic fields. The device is intrinsically linear and has a wide dynamic range such that it can measure magnetic field strengths from nanoteslas to teslas. Furthermore, its sensitivity is independent of size for resonating bars of the same material and aspect ratio. This makes it ideally suited for miniaturization using MEMS techniques.. Various polysilicon xylophone bars have been designed, processed, and characterized. The output response has verified the size-independent scaling law and sensitivities of the order of 100 nanoTesla have been achieved with drive currents as low as 20 microamps. This drive current is limited by the sheet resistance of the polysilicon support electrodes and directly affects the sensitivity The electrodes also have a dramatic effect on the resonant frequency since they act as torsional stiffening members on the resonating bar. For example, for a 500x50 micron xylophone the resonant frequency varies from the designed 69kHz to over 95 kHz for 10 micron wide support electrodes. The electrodes do not affect the mechanical Q-factors observed and values in excess of 20,000 at reduced pressures have been routinely obtained.

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Section: Modeling Studiesmentioning

confidence: 99%

<title>Polysilicon xylophone bar magnetometers</title>

et al. 1999

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“…Smaller sensors based on Terfenol-D have been demonstrated, and by detecting the deformation of commercial AFM cantilevers that were coated with Terfenol-D, a magnetic field sensitivity of 1 μT was achieved. 17 This shows the ability of Terfenol-D based sensors to be realized on the microscale, however, this particular sensor suffers the major drawback that the achieved sensitivity is insufficient for many applications. Also integration on a chip and production of an array of sensors would be technically very demanding.…”

Section: Introductionmentioning

confidence: 96%

Model of a microtoroidal magnetometer

Forstner

Knittel

Rubinsztein‐Dunlop

et al. 2012

Optical Sensing and Detection II

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We present a model of a cavity optomechanical magnetic field sensor based on a microtoroidal resonator. The magnetic field induced expansion of a magnetostrictive material is transduced onto the physical structure of a highly compliant optical microresonator. The resulting motion is read out optically with ultra-high sensitivity. According to our theoretical model sensitivities of up to 750 fT/ √ Hz may be possible. The simultaneous presence of high-quality mechanical and optical resonances in microtoroids greatly enhances both the response to the magnetic field and the measurement sensitivity.

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“…Magnetic field sensors based on magnetostriction have been built using microcantilevers [1], and piezoelectric elements [2], which reach sensitivities in the μT-range.…”

Section: Introductionmentioning

confidence: 99%