A microelectromechanics-based frequency-signature sensor

Haronian, D.; MacDonald, N.C.

doi:10.1016/0924-4247(96)01163-6

Cited by 20 publications

(17 citation statements)

References 16 publications

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“…Nonresonant accelerometers and pressure sensors are currently the [128] commercially most successful micromachined silicon sensors [86]. In 1995, over 50 million silicon pressure sensors ± mainly manifold pressure sensors for the automotive industry and disposable blood pressure sensors ± and approximately 15 million silicon acceleration sensors were shipped [86].…”

Section: Resonant Sensor Applicationsmentioning

confidence: 99%

Micromachined Resonant Sensors— an Overview

Brand

Baltes

1998

Sensors Update

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Section: Resonant Sensor Applicationsmentioning

confidence: 99%

Micromachined Resonant Sensors— an Overview

Brand

Baltes

1998

Sensors Update

View full text Add to dashboard Cite

“…Several researchers have attempted to develop various types of ABM for CI applications 5 11 12 13 14 17 18 19 25 33 34 . The majority of previous studies focused only on ABM 10 11 12 13 16 17 18 19 25 itself or simply proposed the concept of CI 33 34 ; Inaoka et al were the first to conduct animal testing of an ABM 16 . In the work cited by Ref.…”

Section: Discussionmentioning

confidence: 99%

“…ABMs are acoustic sensors that mimic the tonotopy of the cochlea: passive frequency selectivity and acoustic-to-electric energy conversion. The frequency selectivity of ABMs has been realized by varying the beam length 8 9 10 11 12 13 , membrane width 5 14 15 16 17 18 19 , and beam thickness 20 . The energy conversion of the cochlea can be achieved by a piezoelectric effect 8 9 14 15 19 21 , piezoresistive effect 22 23 24 , and optical readout 12 17 .…”

mentioning

confidence: 99%

A microelectromechanical system artificial basilar membrane based on a piezoelectric cantilever array and its characterization using an animal model

Jang

Lee

Woo

et al. 2015

Sci Rep

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We proposed a piezoelectric artificial basilar membrane (ABM) composed of a microelectromechanical system cantilever array. The ABM mimics the tonotopy of the cochlea: frequency selectivity and mechanoelectric transduction. The fabricated ABM exhibits a clear tonotopy in an audible frequency range (2.92–12.6 kHz). Also, an animal model was used to verify the characteristics of the ABM as a front end for potential cochlear implant applications. For this, a signal processor was used to convert the piezoelectric output from the ABM to an electrical stimulus for auditory neurons. The electrical stimulus for auditory neurons was delivered through an implanted intra-cochlear electrode array. The amplitude of the electrical stimulus was modulated in the range of 0.15 to 3.5 V with incoming sound pressure levels (SPL) of 70.1 to 94.8 dB SPL. The electrical stimulus was used to elicit an electrically evoked auditory brainstem response (EABR) from deafened guinea pigs. EABRs were successfully measured and their magnitude increased upon application of acoustic stimuli from 75 to 95 dB SPL. The frequency selectivity of the ABM was estimated by measuring the magnitude of EABRs while applying sound pressure at the resonance and off-resonance frequencies of the corresponding cantilever of the selected channel. In this study, we demonstrated a novel piezoelectric ABM and verified its characteristics by measuring EABRs.

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“…As the resonance frequency of a beam varies depending on its length, an array of beams with different lengths has mechanical frequency selectivity. Since Tanaka et al proposed the fish‐bone like silicon resonator array, several groups have developed beam array‐type ABMs . Figure c shows the beam array‐type ABM developed in 2013 by Kim et al A MEMS beam array with both sides fixed was fabricated using an isotropic silicon dry etching process with XeF 2 gas .…”

Section: Passive Mechanical Frequency Selectivity Of Abmsmentioning

confidence: 99%

Biomimetic Artificial Basilar Membranes for Next‐Generation Cochlear Implants

Jang

Choi

2017

Adv Healthcare Materials

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Patients with sensorineural hearing loss can recover their hearing using a cochlear implant (CI). However, there is a need to develop next-generation CIs to overcome the limitations of conventional CIs caused by extracorporeal devices. Recently, artificial basilar membranes (ABMs) are actively studied for next-generation CIs. The ABM is an acoustic transducer that mimics the mechanical frequency selectivity of the BM and acoustic-to-electrical energy conversion of hair cells. This paper presents recent progress in biomimetic ABMs. First, the characteristics of frequency selectivity of the ABMs by the trapezoidal membrane and beam array are addressed. Second, to reflect the latest research of energy conversion technologies, ABMs using various piezoelectric materials and triboelectric-based ABMs are discussed. Third, in vivo evaluations of the ABMs in animal models are discussed according to the target position for implantation. Finally, future perspectives of ABM studies for the development of practical hearing devices are discussed.

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A microelectromechanics-based frequency-signature sensor

Cited by 20 publications

References 16 publications

Micromachined Resonant Sensors— an Overview

Micromachined Resonant Sensors— an Overview

A microelectromechanical system artificial basilar membrane based on a piezoelectric cantilever array and its characterization using an animal model

Biomimetic Artificial Basilar Membranes for Next‐Generation Cochlear Implants

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