A microfabricated Pirani pressure sensor operating near atmospheric pressure

Doms, Marco; Bekesch, Andre; Mueller, Joerg

doi:10.1088/0960-1317/15/8/018

Cited by 57 publications

(22 citation statements)

References 19 publications

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“…These gauges are named P1, P54, P99, and P162, respectively. To enhance the sensitivity for a range from 760 Torr to 1 Torr, the sense gap is designed to be ≈1 μm [30]. This sense gap is identical to the narrow channel height in the KLP, so their fabrication steps are identical.…”

Section: Heater Design and Pirani Gaugementioning

confidence: 99%

A Si-Micromachined 162-Stage Two-Part Knudsen Pump for On-Chip Vacuum

Gupta

Gianchandani

2014

J. Microelectromech. Syst.

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This paper investigates a two-part architecture for a Knudsen vacuum pump with no moving parts. This type of pump exploits the thermal transpiration that results from the free-molecular flow in nonisothermal channels. For a high compression ratio, 162 stages are serially cascaded. The two-part architecture uses 54 stages designed for the pressure range from 760 to ≈50 Torr, and 108 stages designed for lower pressures. This approach provides greater compression ratio and speed than using a uniform design for each stage. Finite element simulations and analytical design analysis are presented. A five-mask singlewafer fabrication process is used for monolithic integration of the Knudsen pump that has a footprint of 12 × 15 mm 2 . The pressure levels of each stage are measured by integrated Pirani gauges. Experimental evaluation shows that, using an input power of ≈0.39 W, the evacuated chamber is reduced from 760 to ≈0.9 Torr, resulting in a compression ratio of ≈844. The vacuum levels are sustained during 37 days of continuous operation.[2013-0138]

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Section: Heater Design and Pirani Gaugementioning

confidence: 99%

A Si-Micromachined 162-Stage Two-Part Knudsen Pump for On-Chip Vacuum

Gupta

Gianchandani

2014

J. Microelectromech. Syst.

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“…The overall size of the pumping unit is approximately 15 mm Â 20 mm, and the lowest pressure achievable is 495 mbar. A Pirani pressure sensor for pressure measurements, in the high vacuum side was microfabricated in the same process (Doms, Bekesch, & Müller, 2005). A miniature scroll pump with a scroll height of 3 mm for vacuum pumping was made for a miniature quadrupole array (Wiberg et al, 2003).…”

Section: E Other Parts (Detectors and Pumps)mentioning

confidence: 99%

Microchip technology in mass spectrometry

Sikanen

Franssila

Kauppila

et al. 2009

Mass Spectrom. Rev.

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Microfabrication of analytical devices is currently of growing interest and many microfabricated instruments have also entered the field of mass spectrometry (MS). Various (atmospheric pressure) ion sources as well as mass analyzers have been developed exploiting microfabrication techniques. The most common approach thus far has been the miniaturization of the electrospray ion source and its integration with various separation and sampling units. Other ionization techniques, mainly atmospheric pressure chemical ionization and photoionization, have also been subject to miniaturization, though they have not attracted as much attention. Likewise, all common types of mass analyzers have been realized by microfabrication and, in most cases, successfully applied to MS analysis in conjunction with on-chip ionization. This review summarizes the latest achievements in the field of microfabricated ion sources and mass analyzers. Representative applications are reviewed focusing on the development of fully microfabricated systems where ion sources or analyzers are integrated with microfluidic separation devices or microfabricated pums and detectors, respectively. Also the main microfabrication methods, with their possibilities and constraints, are briefly discussed together with the most commonly used materials.

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“…The new sensor elements are much smaller in size and are competitive 2,4,5, [11][12][13]21,[28][29][30][31][32][33][36][37][38]42,45 with or even improved 1,3, 15,17,[23][24][25]43 in sensitivity compared to conventional Pirani gauges. Many designs [6][7][8][9][10][14][15][16][17][18][19][20]22,26,34 have been developed for specific pressure ranges. For the rough vacuum regime, there are mainly two different approaches for improving the sensitivity.…”

Section: Introductionmentioning

confidence: 99%