A microfluidic-electric package for power MEMS generators

Herrault, Florian; Ji, Chang-Hyeon; Kim, Seong-Hyok; Wu, Xiaosong; Allen, Mark G.

doi:10.1109/memsys.2008.4443605

Cited by 5 publications

(4 citation statements)

References 5 publications

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“…An air-driven microfluidic-electric power generator was reported by Herrault et al [96]. The packaged system combines fluidic, mechanical, magnetic, and electrical functionalities.…”

Section: Mechanical Energy Into Electricitymentioning

confidence: 99%

“…;(b) three-dimensional cross-view schematics of the microfluidic-electric package and the real view of the power before assembly in Ref [96]. Schematic of an NG that operates in biofluid and the two types of connections used to characterize the performance of the NG (The pink and blue curves represent signals from the forward connected current/voltage (I/V) meter and the reversely connected I/V meter, respectively.…”

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confidence: 99%

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Micro/nanofluidics-enabled energy conversion and its implemented devices

Yang

Liu

2010

Front. Energy Power Eng. China

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Most people were not aware of the role of energy as a basic force that drives the development and economic growth of the world until the two great oil crises occurred. According to the conservation law, energy not only exists in various forms but is also capable of being converted from one form to another. The common forms of energy are mechanical energy, chemical energy, internal energy, electrical energy, atomic energy, and electromagnetic energy, among others. The fluids in nature serve as the most common carriers and media in the energy conversion process. Following the rapid development of microelectromechanical systems (MEMS) technology, the energy supply and conversion issue in micro/nano scale has also been introduced in research laboratories worldwide. With unremitting efforts, great quantities of micro/ nano scale energy devices have been investigated. Micro/ nanofluid shows distinct features in transporting and converting energy similar to their counterpart macroscale tasks. In this paper, a series of micro/nanofluid-enabled energy conversion devices is reviewed based on the transformation between different forms of energy. The evaluation and contradistinction of their performances are also examined. The role of micro/nanofluid as media in micro/nano energy devices is summarized. This contributes to the establishment of a comprehensive and systematic structure in the relationship between energy conversion and fluid in the micro/nano scale. Some fundamental and practical issues are outlined, and the prospects in this challenging area are explored.

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“…An air-driven microfluidic-electric power generator was reported by Herrault et al [96]. The packaged system combines fluidic, mechanical, magnetic, and electrical functionalities.…”

Section: Mechanical Energy Into Electricitymentioning

confidence: 99%

mentioning

confidence: 99%

Micro/nanofluidics-enabled energy conversion and its implemented devices

Yang

Liu

2010

Front. Energy Power Eng. China

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“…The design and performance comparisons are detailed in [11] and [12]. As an ongoing effort toward integration and packaging, compact power generators combining an electrical microgenerator and a small-scale air-driven turbine have been presented [13], [14]. These devices used ball bearings to support the rotor.…”

Section: Introductionmentioning

confidence: 99%

Fabrication and Performance of Silicon-Embedded Permanent-Magnet Microgenerators

Herrault

Yen

et al. 2010

J. Microelectromech. Syst.

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This paper focuses on the design, fabrication, and characterization of silicon-packaged permanent-magnet (PM) microgenerators. The use of silicon packaging favors fine control on shape and dimensions in batch fabrication and provides a path toward high rotational speeds (∼1 Mr/min), a requirement for ultimate compactness of microgenerators. The successful silicon packaging of these microgenerators consisted of three essential elements: 1) a winding scheme allowing both nonplanar fabrication and through-wafer interconnects; 2) laminations built into the silicon for enhanced electrical performance; and 3) a balancing scheme for the heavy PM rotor to ensure its maximum performance. The devices were fabricated using bonded silicon wafers, integrated magnetics, and an electroplated metal. The mechanical strength of the 12-mm-diameter silicon-packaged PM rotors was evaluated at high rotational speeds using an external spindle drive. Speeds up to 200 000 r/min were achieved prior to a mechanical rotor failure. The generators were electrically characterized, and an output power in excess of 1 W across a resistive load of 0.32 Ω was measured at a maximum speed. A 225% power increase was also experimentally determined due to the addition of a laminated stator back iron.

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“…In addition, both energy scavengers adopt electromagnetic energy generation, based on the simple structures involved, and wide compatibility with existing fabrication technologies. For rapid prototyping of the first-generation devices, both energy scavengers are fabricated by laser micromachining and stereolithography (SLA) based polymer micromachining [15]. The present devices synergistically combine aspects of scavenging power from both airflow-based and vibratory energy scavenging, while avoiding the limitations of both approaches with much reduction in structural complexity.…”

Section: Introductionmentioning

confidence: 99%

An electromagnetic energy scavenger from direct airflow

Kim

Galle

et al. 2009

J. Micromech. Microeng.

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This paper presents two types of electromagnetic power generators exploiting direct conversion of airflow into mechanical vibration: (1) a windbelt-based vibratory linear energy scavenger targeting strong airflows and (2) a Helmholtz-resonator-based generator capable of scavenging energy from weaker airflows, i.e. environmental airflows. Both devices consist of two tightly coupled parts: a mechanical resonator, which produces high-frequency mechanical oscillation from quasi-constant airflow, and a permanent magnet/coil system, which generates electrical power from the resonator's motion. The proposed energy scavengers obviate the typically required matching of the resonant frequencies of the scavenger and the ambient energy sources it taps. This enables a device that is simpler, smaller and higher-frequency than the previously reported resonant power generator. The windbelt-based energy scavenger demonstrated a peak-to-peak output voltage of 81 mV at 0.53 kHz, from an input pressure of 50 kPa. The Helmholtz-resonator-based energy scavenger achieved a peak-to-peak output voltage of 4 mV at 1.4 kHz, from an input pressure of 0.2 kPa, which is equivalent to 5 m s −1 (10 mph) of wind velocity.

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A microfluidic-electric package for power MEMS generators

Cited by 5 publications

References 5 publications

Micro/nanofluidics-enabled energy conversion and its implemented devices

Micro/nanofluidics-enabled energy conversion and its implemented devices

Fabrication and Performance of Silicon-Embedded Permanent-Magnet Microgenerators

An electromagnetic energy scavenger from direct airflow

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