A Micromachined Electron Beam Ion Source

Petzold, Guillermo; Siebert, P.; Müller, Jörg

doi:10.1007/978-94-017-2264-3_40

Cited by 4 publications

(3 citation statements)

References 2 publications

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“…Typically, these ion sources are based on electron ionization with field emitters, microwave plasma, or filaments as the source of primary electrons. A fully integrated plasma electron ion source for miniature mass spectrometers, and especially for a miniaturized time-of-flight (TOF) instrument, was fabricated (Petzold, Siebert, & Müller, 2000;Hauschild et al, 2005;Wapelhorst, Hauschild, & Müller, 2007). The ion source was made from three substrates (silicon, borosilicate, and oxidized silicon wafers), and DRIE, anisotropic etching, sputtering, and anodic bonding were applied during the microfabrication process.…”

Section: Miniaturized Ion Sources For Gaseous Samplesmentioning

confidence: 99%

Microchip technology in mass spectrometry

Sikanen

Franssila

Kauppila

et al. 2009

Mass Spectrom. Rev.

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Microfabrication of analytical devices is currently of growing interest and many microfabricated instruments have also entered the field of mass spectrometry (MS). Various (atmospheric pressure) ion sources as well as mass analyzers have been developed exploiting microfabrication techniques. The most common approach thus far has been the miniaturization of the electrospray ion source and its integration with various separation and sampling units. Other ionization techniques, mainly atmospheric pressure chemical ionization and photoionization, have also been subject to miniaturization, though they have not attracted as much attention. Likewise, all common types of mass analyzers have been realized by microfabrication and, in most cases, successfully applied to MS analysis in conjunction with on-chip ionization. This review summarizes the latest achievements in the field of microfabricated ion sources and mass analyzers. Representative applications are reviewed focusing on the development of fully microfabricated systems where ion sources or analyzers are integrated with microfluidic separation devices or microfabricated pums and detectors, respectively. Also the main microfabrication methods, with their possibilities and constraints, are briefly discussed together with the most commonly used materials.

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Section: Miniaturized Ion Sources For Gaseous Samplesmentioning

confidence: 99%

Microchip technology in mass spectrometry

Sikanen

Franssila

Kauppila

et al. 2009

Mass Spectrom. Rev.

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“…Alternative electron sources [4][5][6][7] The miniaturization of the EI source for its use in either portable mass spectrometers or in mass spectrometers for use in outer space has driven an exploration of alternatives to filaments as an electron source. For these types of application there is a need for low power, lightweight, small-scale instrumentation.…”

Section: Electron Ionizationmentioning

confidence: 99%

“…An alternative to field emitters was presented by Petzold and co-workers. 7 They described a micro-machined RF argon plasma electron source. Electrons are extracted from the plasma and focused by ion optics into an ionization chamber.…”

Section: Electron Ionizationmentioning

confidence: 99%

An Overview of Some Recent Developments in Ionization Methods for Mass Spectrometry

Berkel

2003

Eur J Mass Spectrom (Chichester)

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An overview of some recent advances in ionization sources for mass spectrometry is presented. Limitations were set so that the overview covers ionization techniques relevant to organic and biological analysis that have appeared in the literature since the year 2000. No effort is made to be comprehensive. Rather, a broad sweep overview of author-subjective highlights among a wide variety of sources is presented. These ionization sources include electron ionization, chemical ionization, various atmospheric plasma ionization sources, laser desorption sources, sonic spray and electrospray ionization sources.

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