A Micro Mass Spectrometer

Petzold, Guillermo; Siebert, P.; Müller, Jörg

doi:10.1007/978-94-010-1015-3_97

Cited by 2 publications

(1 citation statement)

References 3 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Presently, an electrical circuit is being developed to simplify its application. Furthermore, the sensor will be implemented into other microsystems as well, e.g., a micromachined mass spectrometer [20,21].…”

Section: Discussionmentioning

confidence: 99%

A microfabricated Pirani pressure sensor operating near atmospheric pressure

Doms

Bekesch

Mueller

2005

J. Micromech. Microeng.

View full text Add to dashboard Cite

A micromachined pressure sensor based on the measurement of the pressure-dependent thermal conductivity of gaseous media (Pirani principle) is presented. The sensor consists of a freestanding microbridge with a defined distance to the substrate which acts as a heat sink. The theory to compute the necessary geometrical dimensions of the sensor element is presented. Due to a novel fabrication process, based on a sacrificial layer of ZnO, the sensor can readily be adapted to operate in different pressure ranges, even exceeding atmospheric pressure. A fully integrated bridge arrangement was used to compensate for ambient temperature changes. Experimental results for different sensor geometries are presented which correspond well with the theory. Basic design rules for micromachined Pirani pressure sensors are derived from the measurements.

show abstract

Section: Discussionmentioning

confidence: 99%

A microfabricated Pirani pressure sensor operating near atmospheric pressure

Doms

Bekesch

Mueller

2005

J. Micromech. Microeng.

View full text Add to dashboard Cite

show abstract

Fabrication of an Ion Source using Carbon Nanoparticle Field Emitters for a Micro Time-of-Flight Mass Spectrometer

Yoon

Song

Cho

et al. 2007

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

View full text Add to dashboard Cite

This paper presents the fabrication of an ion source using carbon nanoparticle field emitters for a micro time-of-flight mass spectrometer (TOFMS). The micro TOFMS consists of a glass substrate with several electrodes and a silicon substrate with carbon nanoparticle (CNP) field emitters. The type of CNP field emitters is the triode type with which we can control the emission current at low voltage. The CNP layer is grown by hot-filament chemical-vapor deposition (HFCVD). The size of the assembled device is 10 x 10 x 1 mm3. The emission current of the ion source can be controlled from 0 to 94.3 ItA when the gate voltage varies from 0 to 85 V.

show abstract

A Micro Mass Spectrometer

Cited by 2 publications

References 3 publications

A microfabricated Pirani pressure sensor operating near atmospheric pressure

A microfabricated Pirani pressure sensor operating near atmospheric pressure

Fabrication of an Ion Source using Carbon Nanoparticle Field Emitters for a Micro Time-of-Flight Mass Spectrometer

Contact Info

Product

Resources

About