42nd AIAA Aerospace Sciences Meeting and Exhibit 2004
DOI: 10.2514/6.2004-1042
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A Micromachined Geometric Moiré Interferometric Floating-Element Shear Stress Sensor

Abstract: This paper presents the development of a floating-element shear stress sensor that permits the direct measurement of skin friction based on geometric Moiré interferometry. The sensor was fabricated using an aligned waferbond/thin-back process producing optical gratings on the backside of a floating element and on the top surface of the support wafer. Experimental characterization indicates a static sensitivity of 0.26 µm/Pa, a resonant frequency of 1.7 kHz, and a noise floor of 6.2 mPa/√Hz.

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Cited by 28 publications
(12 citation statements)
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“…A photodiode array with 16 elements is used to replace the original charge-coupled device (CCD) arrays for imaging 15 which reduces the amount of data for processing.…”
Section: Moiré Datamentioning
confidence: 99%
“…A photodiode array with 16 elements is used to replace the original charge-coupled device (CCD) arrays for imaging 15 which reduces the amount of data for processing.…”
Section: Moiré Datamentioning
confidence: 99%
“…Horowitz et al [16]) is highly impractical in in-vitro hemodynamics experiments, and the use of pressure drop measurements to determine the wall shear stress implies averaging over a certain section, local wall shear stress values are usually determined from an estimate of the wall shear rate. When a Newtonian test fluid is used, shear stress is directly proportional to shear rate, with µ the proportionality constant.…”
Section: Papermentioning
confidence: 99%
“…In addition, Zhe et al [17,18] developed a beam type of floating-element sensor that used differential capacitance detection scheme to measure displacement. Tseng and Lin [19] developed an optical fiber-based method of measuring displacement, and Horowitz et al [20] developed a geometric Moiré interferometry method of measuring displacement. In the latter study, the unsteady properties were characterized, which revealed a sensor resonant frequency at 1.7 kHz and a noise floor shear level at 6.2 mPa.…”
Section: Introductionmentioning
confidence: 99%