2001
DOI: 10.1002/mmce.1037
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A micromachined RF low phase noise voltage-controlled oscillator for wireless communications

Abstract: An RF low phase noise voltage-controlled oscillator is implemented with micromachined IC-compatible variable capacitors and three-dimensional coil inductor. Unlike conventional on-chip passive devices, the micromachined variable capacitors achieve a high-Q value above 60 at 1 GHz with a 15% tuning range for a nominal 2 pF capacitance with 3 V tuning voltage. Three-dimensional inductors minimize the substrate loss and achieve a Q of 30 at 1 GHz with a 4.8 nH inductance. Both passive components are fabricated on… Show more

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Cited by 30 publications
(37 citation statements)
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“…In general, the tunability of carbon based varactors, similar to MEMS parallel plate varactors, is inherently limited compared to capacitance ratio of 4-6 of standard solid-state varactors. 37 However, voltage-controlled oscillators 108,109 and tunable filters 110 have already been demonstrated using the limited tunability of MEMS varactors which show a promise for possible application of the carbon based varactor.…”
Section: B Tunability and Parasitic Capacitancesmentioning
confidence: 99%
“…In general, the tunability of carbon based varactors, similar to MEMS parallel plate varactors, is inherently limited compared to capacitance ratio of 4-6 of standard solid-state varactors. 37 However, voltage-controlled oscillators 108,109 and tunable filters 110 have already been demonstrated using the limited tunability of MEMS varactors which show a promise for possible application of the carbon based varactor.…”
Section: B Tunability and Parasitic Capacitancesmentioning
confidence: 99%
“…The implementation of these devices is in low noise power amplifiers, matching networks, and monolithic lownoise VCO is an attractive proposition. In fact, the quality factor of these components ultimately determines the phase noise performance, which is critical in high performance communication systems [1]. The introduction of MEMS in RF systems increases the functionality and improves the performance.…”
Section: Introductionmentioning
confidence: 99%
“…Young and Boser (1997) were the first to develop a surface micro-machined varactor for VCO application. Dec and Suyama (1998) developed twoplate and three-plate varactors in polysilicon micromachining process and used it in VCO circuits.…”
Section: Introductionmentioning
confidence: 99%