A micromachined vibrating gyroscope

Tanaka, Katsuhiko; Mochida, Yoichi; Sugimoto, M.; Moriya, K.; Hasegawa, Takashi; Atsuchi, K.; Ohwada, K.

doi:10.1016/0924-4247(96)80093-8

Cited by 113 publications

(65 citation statements)

References 4 publications

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“…In the past few years, there has been a great deal of research on micromachined gyroscopes [2][3][4][5]. However, the vast majority of these microgyroscopes use electrostatic force to excite a vibrating structure and measure the rate of rotation by the Coriolis effect.…”

Section: Introductionmentioning

confidence: 99%

Design and analysis of a microgyroscope with sol-gel piezoelectric plate

Nguyen

Hui

et al. 1999

Smart Mater. Struct.

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Abstract.A piezoelectric-plate vibration microgyroscope is proposed in this paper. Unlike other piezoelectric gyroscopes, it is based on a piezoelectric plate without the use of any elastic element. Its structure is very simple. The piezoelectric plate is excited in the polarization direction to produce the thickness extension vibration mode. If there is an input rotation on the vibrator, an induced voltage will be produced in the direction perpendicular to the plane composed of the polarization axis and the input angular rate axis according to the Coriolis effect. This arrangement allows for sensing of two-axis rotation on a single chip. A mathematical model for the microgyroscope is presented, and calculated results for a given module are provided. A macromode experiment has been carried out, and experimental results correspond very well to theoretical predictions.

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Section: Introductionmentioning

confidence: 99%

Design and analysis of a microgyroscope with sol-gel piezoelectric plate

Nguyen

Hui

et al. 1999

Smart Mater. Struct.

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“…The variation in the structural dimension due to the fabrication error gives rise to the variation in the frequency difference and eventually reduces the gyroscope yield satisfying the performance specifications. In the fabrication process minimization of the fabrication error is essential in increasing the yield (10), (11) but in the design stage a robust design to minimize the fabrication tolerance must be considered in order to increase the yield and to reduce production cost. Hwang et al (12) have performed an axiomatic design and then a robust design using Taguchi concept (13), (14) for the robust performance regardless of the tolerance.…”

Section: Introductionmentioning

confidence: 99%

Robust Design of a Decoupled Vibratory Microgyroscope Considering Over-Etching as a Fabrication Tolerance Factor

Jeong

Kim

2006

JSME Int. J., Ser. A

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A robust optimal design of a bulk-micromachined, decoupled vibratory microgyroscope was carried out to determine geometric dimensions such that the gyroscopic performance is least affected by a fabrication tolerance. Electro-mechanical vibration analysis considering the sensing electrodes and the electronic signal processing were performed to obtain the frequency responses that influence the gyroscopic performance. A statistically distributed lateral over-etching (LOE) developed in the fabrication process was selected as a fabrication tolerance factor. The dimensions of the driving and sensing spring are selected as design variables which are the sum of deterministic mask dimensions and the LOE. To minimize the influence of LOE on the decoupled vibratory microgyroscope performance, the multi-objective function was formulated so as to minimize the sensitivities of the frequency difference with respect to the LOE. As a result, the standard deviation of the frequency difference and the driving natural frequency are reduced to 78% and 8%, respectively, through the Monte Carlos Simulation (MCS).

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“…Because of its high sensitivity to relative change in capacitance and low-temperature drift, differential capacitance sensing is more widely used in a variety of gyroscopes [3][4][5][6][7][8] and the demand for high-precision sensors is greater than ever, especially for high-resolution gyroscopes. [9][10][11][12] Variation in assembly has long been a key factor that affects the performance of micro-gyroscopes, 13,14 the rotor of which is a closed cylinder composed of materials whose thickness is only 100 μm. Connections between base materials of this size are of the order of microns, 15 which means more attention needs to be paid to avoid obvious deformations and to ensure quality connections.…”

Section: Introductionmentioning

confidence: 99%

Impact of assembly on signal detection from thin-wall rotors of micro-gyroscopes

Liu

et al. 2014

AIP Advances

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The assembly of sealed hollow rotors, a key component in achieving liquid-levitated micro-gyroscopes, represents a significant challenge. The rotor is a thin-wall cylinder composed of materials that are only 100-μm thick. Furnace soldering and hand soldering are used to join the work pieces, but produce defects evident from deformations and surface roughness. Modeling and experiments show that the deformation is related to the temperature during assembly and the mode by which heat is applied to the components. Temperature affects the deformation through thermal stress and air pressure on the rotor, but the mode of heating creates a big difference. Surface deformation of the rotor alters the detecting capacitance and introduces uncertainty in detection sensitivity of the gyroscope. Experiments show that at 220°C, furnace soldering of rotors causes a great decrease in detection sensitivity, leading to a relative uncertainty of nearly 40%. In contrast, hand soldering leads to a relative uncertainty of about 5%. Spot heating of the rotor during assembly is much better than total heating as less thermal stress is generated and the air pressure difference is almost eliminated. Lowering the temperature is helpful to as long as the connection is sufficiently strengthened.

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A micromachined vibrating gyroscope

Cited by 113 publications

References 4 publications

Design and analysis of a microgyroscope with sol-gel piezoelectric plate

Design and analysis of a microgyroscope with sol-gel piezoelectric plate

Robust Design of a Decoupled Vibratory Microgyroscope Considering Over-Etching as a Fabrication Tolerance Factor

Impact of assembly on signal detection from thin-wall rotors of micro-gyroscopes

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