2017
DOI: 10.1016/j.snb.2017.01.052
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A microneedle electrode array on flexible substrate for long-term EEG monitoring

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Cited by 103 publications
(63 citation statements)
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“…As a common material in microfabrication, silicon is often used as a substrate material for microneedle electrodes [ 16 , 17 , 18 , 19 , 20 , 21 , 22 , 23 , 24 , 25 ], and wet etch or dry etch photolithography technology is widely used in the fabrication of silicon-based electrodes. As early as 2001, Griss et al [ 16 ] fabricated microneedle electrodes based on silicon that could be used for EEG signal acquisition.…”
Section: Invasive Microneedle Electrodesmentioning
confidence: 99%
“…As a common material in microfabrication, silicon is often used as a substrate material for microneedle electrodes [ 16 , 17 , 18 , 19 , 20 , 21 , 22 , 23 , 24 , 25 ], and wet etch or dry etch photolithography technology is widely used in the fabrication of silicon-based electrodes. As early as 2001, Griss et al [ 16 ] fabricated microneedle electrodes based on silicon that could be used for EEG signal acquisition.…”
Section: Invasive Microneedle Electrodesmentioning
confidence: 99%
“…Therefore, it is important to develop special electrodes for wearable bio-signal monitoring in home health care. Usually, Ag/AgCl electrodes are widely used in clinical practice, which require skin preparation and the use of gel [ 2 , 3 , 4 ]. The gel may cause skin irritations and allergic reactions, and gets dry during monitoring, reducing the quality of the recorded signals [ 5 , 6 ].…”
Section: Introductionmentioning
confidence: 99%
“…LDW is a promising process for the easy fabrication of conductive patterns due to it being high resolution, maskless, low-cost and easy to manipulate. Various methods have been employed to fabricate microneedle arrays, including etching and lithography [ 4 , 21 , 22 , 23 , 24 , 25 ], laser machining [ 26 , 27 , 28 ], micro-molding [ 29 , 30 , 31 ], 3D printing [ 32 ], thermal drawing [ 33 ], and magnetization-induced self-assembly [ 34 , 35 ], but most of microneedle arrays were fabricated on the rigid substrates. These techniques cannot directly fabricate microneedle arrays on a flexible substrate.…”
Section: Introductionmentioning
confidence: 99%
“…Specifically, the Ag/AgCl electrode suffers from two major defects, namely skin preparation and the use of gel. A microneedle array electrode is a promising dry electrode that has attracted increasing attention in EII [ 11 ], ECG [ 12 ], EMG [ 13 ], and EEG [ 14 ] monitoring due to excellent properties including painless puncture without skin preparation, minimal skin trauma, reduced infection, ease of operation, and high selectivity [ 15 , 16 ]. The previous microneedle array electrode mainly focused on the bio-signals recording.…”
Section: Introductionmentioning
confidence: 99%