Dielectrophoresis (DEP) force will arise when an inhomogeneous AC electric field with sinusoidal wave is applied to microelectrodes. By using DEP, we could distinguish between viable and non-viable cells by their movement through a non-uniform electric field. In this paper, we propose a yeast cell separation system, which utilizes an Au DEP chip and an optical tweezers. The Au DEP chip is planar quadrupole microelectrodes, which were fabricated by Au thin-film and a box cutter. This fabrication method is low cost and simpler than previous existing methods. The tip of the optical tweezers was fabricated by dynamic chemical etching in a mixture of hydrogen fluoride and toluene. The optical tweezers has the feature of high manipulation performance. That does not require objective lens for focusing light because the tip of optical tweezers has conical shape. By using both the Au DEP chip and optical tweezers, we could obtain three-dimensional manipulation of specific cells after viability separation.