1998
DOI: 10.1016/s0304-3991(97)00058-2
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A millimeter-wave near-field scanning probe with an optical distance control

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Cited by 13 publications
(5 citation statements)
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“…Others have studied evanescent fields in the context of imaging as well [14,15]. Several research groups, including our own, have used microwave resonators in the characterization of semiconductors with λ/100 [16][17][18][19][20][21][22][23]. The evanescent microwave probe (EMP) used in our work is a planar structure [19] that readily lends itself to implementation on a silicon cantilever beam.…”
Section: Scanning Evanescent Microwave Probe (Semp)mentioning
confidence: 99%
“…Others have studied evanescent fields in the context of imaging as well [14,15]. Several research groups, including our own, have used microwave resonators in the characterization of semiconductors with λ/100 [16][17][18][19][20][21][22][23]. The evanescent microwave probe (EMP) used in our work is a planar structure [19] that readily lends itself to implementation on a silicon cantilever beam.…”
Section: Scanning Evanescent Microwave Probe (Semp)mentioning
confidence: 99%
“…Although its precise value has to be determined by numerical calculations [12], [13], we can estimate it by using an approximation of Hallén's equations for thin short wire antennas . For our short antennas (0.3-1 mm) and frequencies of interest (1)(2)(3)(4)(5), the impedance has a nearly pure capacitive character ( ) with values in the range of 10 -10 . The protruding conductor functions as a nearly ideal current source and it is difficult to match its high impedance to the subsequent preamplifier with a standard impedance of approximately .…”
Section: Sensitivity Of the System And Calibration Of The Probesmentioning
confidence: 99%
“…In some cases, a modification in the probe geometry, such as the use of slit probes [3], [4], small dipole antennas, and open-ended transmission lines [5], [6] can increase signal-matching effi- ciency, change the polarization, or limit the region to which the antenna is sensitive. Due to good sensitivity and well-defined electric properties, we have focused our attention on the miniaturized coaxial antennas-cylindrical short monopoles-where a central conductor protrudes for a defined length from the shielding (see Fig.…”
Section: Electric-field Antennas and Position/signal Difference Mmentioning
confidence: 99%
“…컫는 소형 개구(subwavelength aperture)에 의한 전자기적인 결합(electromagnetic coupling) 현상은 1944년 Hans Bethe [1] ( [5] . 들이 발표되었는데, 제안된 개구 구조들의 대표적인 형태로서, C 형태(C-shaped) 또는 H 형태(H-shaped)가 많은 관심을 끌어 왔다 [8] .…”
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