“…Heating devices range from millimeters to several centimeters, so-called meso-hotplates, have been widely studied and utilized for many applications: gas and flow sensors [1,2], micro power generators [3][4][5], frequency-stabilized lasers [6], discharge lamps for atomic clocks and magnetometers [7] and microfluidics [3,8,9], just to name a few. Such meso-hotplates typically contain metallic or resistive heaters fabricated on a thermomechanically decoupled area of a dielectric substrate.…”