A model-based approach for the calibration and traceability of the angle resolved scattering light sensor

Abstract

Within the field of geometric product specification there is a growing need for the application of inline measurement systems. The use of inline measurement requires robust and fast measurement principles. A very robust optical measurement principle is the angle resolved scattering light (ARS) sensor. The ARS sensor provides high precision and high resolution measurement data of technical surfaces because the surface angles are measured as an intensity distribution on a detector instead of measuring a series of discrete height values. However, until now, there were no specific measurement standards for the calibration of the ARS sensor and no traceability was ensured. In this paper, new strategies for the calibration of an ARS sensor are proposed. A new mathematical model for the ARS sensor is introduced. Based on this, two new measurement standards for the calibration of the sensor parameters are derived. These standards are designed with a model-based approach and can calibrate sensor-specific properties of the ARS sensor. The manufacturing of the standards is described and measurement results are provided.

Comparison of material measures for the determination of transfer characteristics of surface topography measuring instruments

“…Besides the measurement of transfer properties, virtual measurements have been examined for their determination [12][13][14][15]. Also the determination based on theoretical models like the instrument transfer function have been proposed [16,17].…”

The Present State of Surface Conditioning in Cutting and Grinding

“…A coherent light source allows the identification of spatially resolved roughness information; however, the requirements for the ambient conditions and measurement evaluation are quite high. With an incoherent light source, the spatial information is lost, i.e., only mean roughness information is acquired, but the on-machine integration and evaluation are more convenient [33]. In [34], the control target value surface topography is to be monitored in-process by an angle resolved scattered light sensor, which is not influenced by machine vibrations.…”

Scientific modeling of optical 3D measuring devices based on GPU-accelerated ray tracing using the NVIDIA OptiX Engine

“…These models, so-called virtual measurement systems, are characterized by the fact that they take into account various measurement influencing factors of relevance and thus reproduce the real measurement process comprehensively in the context of a precise physical model. [2][3][4] Underlying influencing factors can be varied quickly and on a large scale on the basis of suitable physical models. The model-based prediction of measurement results can thus be applied, in addition to the a priori estimation of expected measurement deviations, e.g.…”