A model for nanogrinding based on direct evidence of ground chips of silicon wafers

Zhang, Zhenyu; Huo, Yanxia; Guo, Dongming

doi:10.1007/s11431-013-5286-2

Cited by 112 publications

(19 citation statements)

References 19 publications

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“…where r is a ratio of the width to thickness of an undeformed chip, E 1 and E 2 are the elastic moduli of a diamond block and a Si wafer, respectively, and v f and v s are the infeed rate and speed of the developed diamond wheel, correspondingly. r is 1.49 20 . h m is calculated and listed in Table 1 .…”

Section: Discussionmentioning

confidence: 96%

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Nanoscale solely amorphous layer in silicon wafers induced by a newly developed diamond wheel

Zhang

Guo

Cui

et al. 2016

Sci Rep

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Nanoscale solely amorphous layer is achieved in silicon (Si) wafers, using a developed diamond wheel with ceria, which is confirmed by high resolution transmission electron microscopy (HRTEM). This is different from previous reports of ultraprecision grinding, nanoindentation and nanoscratch, in which an amorphous layer at the top, followed by a crystalline damaged layer beneath. The thicknesses of amorphous layer are 43 and 48 nm at infeed rates of 8 and 15 μm/min, respectively, which is verified using HRTEM. Diamond-cubic Si-I phase is verified in Si wafers using selected area electron diffraction patterns, indicating the absence of high pressure phases. Ceria plays an important role in the diamond wheel for achieving ultrasmooth and bright surfaces using ultraprecision grinding.

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Section: Discussionmentioning

confidence: 96%

“…The maximum undeformed chip thickness, h m , is used to characterize the grinding conditions and performance 4 5 20 . The volume fraction of diamond grains in a diamond block, v is calculated 4 20 ,…”

Section: Discussionmentioning

confidence: 99%

Nanoscale solely amorphous layer in silicon wafers induced by a newly developed diamond wheel

Zhang

Guo

Cui

et al. 2016

Sci Rep

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“…These constitute an advancement to traditional manufacturing, dramatically reducing the contamination or negative impact, to the environment (Cui et al 2019;Wang et al 2018). Chemical mechanical polishing slurries (Zhang et al 2019), diamond wheels (Zhang et al 2015) and novel machining methods (Zhang et al 2013) have been employed in a wide spectrum of fields, such as aerospace, ocean, nuclear, and power engineering (Zhang et al 2012).…”

Section: Introductionmentioning

confidence: 99%

Click chemical assembly and validation of bio-functionalized superparamagnetic hybrid microspheres

et al. 2020

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Surface derivatized magnetic nanoparticles have been commonly used for magnetic separation. Facile mechanisms are needed to be developed for the design of bio-functionalized magnetic hybrid materials, where the surfaces can be regenerated for the re-use of the developed platforms. Superparamagnetic iron oxide nanoparticles with a diameter below 10 nm were synthesized via a novel microwave-assisted hydrothermal method in the presence of citrate ions, which allowed to obtain uniform and negatively charged nanoparticles. These were then coupled with Poly-l-lysine (PLL), forming micrometersized self-assembled spherical entities. Cross-linking the PLL within these microspheres with glutaraldehyde stabilized them chemically and mechanically. The active bio-functionality was introduced by a protein grafting methodology, using m-maleimidobenzoyl-N-hydroxysulfosuccinimide ester (SMBS). The Moringa oleifera Coagulant Protein (MOCP) from a seed extract was employed for its characteristic coagulation activity. The performance of the MOCP functionalized microspheres was evaluated as a function of turbidity removal of problematic colloidal clay from water via magnetic separation, resulting in over 80% of activity within 15 min. Surface of these hybrid materials can be regenerated by treatment with alcohol, allowing their easy magnetic separation and re-use. The rapid and strong response with tunable magnetic property makes these hybrid microspheres a powerful tool for many potential applications, due to the general applicability of the developed methodology.

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“…Diamonds are widely used in cutting industries to machine difficult-to-cut materials, such as stones, glasses and ceramics, due to their highest hardness, low friction coefficient, chemical inertness, high thermal conductivity and great wear resistance [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19]. Hot filament chemical vapor deposition (HFCVD) technique is popularly employed, to deposit diamond films on cemented carbide (WC-Co) tools [20][21][22][23][24].…”

Section: Introductionmentioning

confidence: 99%

A novel approach of deposition for uniform diamond films on circular saw blades

Zhou

Yuan

Lyu

et al. 2017

Plasma Sci. Technol.

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Uniform diamond films are highly desirable for cutting industries, due to their high performance and long lifetime used on cutting tools. Nevertheless, they are difficult to obtain on cutting tools with complicated shapes, greatly limiting the applications of diamond films. In this study, a novel approach of deposition for uniform diamond films is proposed, on circular saw blades made of cemented carbide using reflectors of brass sheets. Diamond films are deposited using hot filament chemical vapor deposition (HFCVD). A novel concave structure of brass sheets is designed and fabricated, improving the distribution of temperature field, and overcoming the disadvantages of the conventional HFCVD systems. This increases the energy efficiency of use without changing the structure and increasing the cost of HFCVD. The grains are refined and the intensities of diamond peaks are strengthened obviously, which is confirmed by scanning electron microscopy and Raman spectra respectively.

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A model for nanogrinding based on direct evidence of ground chips of silicon wafers

Cited by 112 publications

References 19 publications

Nanoscale solely amorphous layer in silicon wafers induced by a newly developed diamond wheel

Nanoscale solely amorphous layer in silicon wafers induced by a newly developed diamond wheel

Click chemical assembly and validation of bio-functionalized superparamagnetic hybrid microspheres

A novel approach of deposition for uniform diamond films on circular saw blades

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