2016
DOI: 10.1038/srep35269
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Nanoscale solely amorphous layer in silicon wafers induced by a newly developed diamond wheel

Abstract: Nanoscale solely amorphous layer is achieved in silicon (Si) wafers, using a developed diamond wheel with ceria, which is confirmed by high resolution transmission electron microscopy (HRTEM). This is different from previous reports of ultraprecision grinding, nanoindentation and nanoscratch, in which an amorphous layer at the top, followed by a crystalline damaged layer beneath. The thicknesses of amorphous layer are 43 and 48 nm at infeed rates of 8 and 15 μm/min, respectively, which is verified using HRTEM.… Show more

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Cited by 14 publications
(6 citation statements)
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“…5b and c. It could be main reasons as following: (a) the well-bridged and efficient thermal conduction network between nanowires and nanowires; (b) SiC NWs with larger aspect ratio than SiC MPs and (c) a better interaction between SiC NWs with the epoxy matrix 27 .
Figure 5( a ) Thermal diffusivity and ( b ) thermal conductivity as a function of SiC NWs or SiC MPs content; ( c ) Thermal conductivity enhancement (TCE) of epoxy composites with 3 wt% filler compared to neat epoxy; ( d ) The model of heat flow for the epoxy composites.
…”
Section: Resultsmentioning
confidence: 99%
“…5b and c. It could be main reasons as following: (a) the well-bridged and efficient thermal conduction network between nanowires and nanowires; (b) SiC NWs with larger aspect ratio than SiC MPs and (c) a better interaction between SiC NWs with the epoxy matrix 27 .
Figure 5( a ) Thermal diffusivity and ( b ) thermal conductivity as a function of SiC NWs or SiC MPs content; ( c ) Thermal conductivity enhancement (TCE) of epoxy composites with 3 wt% filler compared to neat epoxy; ( d ) The model of heat flow for the epoxy composites.
…”
Section: Resultsmentioning
confidence: 99%
“…This single-mode mechanical deformation at small load has been proven by a recent experiment 2 . A defect free region is necessary for engineering applications, for example, defect free CMP (the chemical mechanical polishing) and the ultraprecision grinding of silicon have been developed based on this principle 34 .…”
Section: Discussionmentioning
confidence: 99%
“…On scratching and grinding process, the α-Si on the topmost of the scratched surface and the damaged crystalline Si with high densities of dislocations underneath the α-Si feature the deformation region 30 33 , and an alternative phase transformation route is suggested: Si-I → α-Si → Si-III/Si-XII in α-Si, which is quite different from that in the case of nanoindentation (i.e., Si-I → Si-II → Si-III/Si-XII or α-Si). Recently, nanoscale solely amorphous layer, followed by pristine crystalline lattice, is obtained under ultraprecision grinding using the newly developed diamond wheel with ceria 34 .…”
Section: Introductionmentioning
confidence: 99%
“…Moreover, traditional heat dissipating materials like copper and aluminium show CTE mismatch to silicon and insulating ceramics and cannot be used for direct device attachment without stress compensating interlayers [27,28]. Silicon carbide (SiC) is on account of its particular crystal structure, usually used in new fixed abrasive lapping slurry [29], development of novel ceramic bond diamond wheels for grinding soft brittle [30][31][32], hard brittle crystals [33], and truing of new resin bond diamond wheels [34]. Not only the hardness property but also the high intrinsic thermal conductivity of SiC possess.…”
Section: Introductionmentioning
confidence: 99%