2019
DOI: 10.3390/sym11091183
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A Modified Equation for Thickness of the Film Fabricated by Spin Coating

Abstract: According to the equation for Newtonian fluids, the film thickness after spin coating is determined by five parameters: angular velocity, spin coating time, viscosity, density of the coating material, and initial thickness of the material before spin coating. The spin coating process is commonly controlled by adjusting only the angular velocity parameter and the coating time in the Newtonian expression. However, the measured coating thickness obtained is then compared to the theoretical thickness calculated fr… Show more

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Cited by 31 publications
(19 citation statements)
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“…The inversely proportional dependence of the layer thickness on the rotation speed was described back in 1958 by Emsley, Bonner, and Peck [ 30 ], considering the problem of the motion of a viscous non-volatile fluid on an infinite rotating disk. However, for the thicknesses of polymer films obtained from film-forming solutions by spin coating, similar dependence was also observed [ 31 , 32 ].…”
Section: Resultssupporting
confidence: 60%
“…The inversely proportional dependence of the layer thickness on the rotation speed was described back in 1958 by Emsley, Bonner, and Peck [ 30 ], considering the problem of the motion of a viscous non-volatile fluid on an infinite rotating disk. However, for the thicknesses of polymer films obtained from film-forming solutions by spin coating, similar dependence was also observed [ 31 , 32 ].…”
Section: Resultssupporting
confidence: 60%
“…The presented dilution of 1:9 (PDMS:hexane) does not rely on any pressure to be applied to seal off the uneven CMOS surface. Instead reliable stamp transfer is achieved by (1) creating a very thin homogeneous layer of PDMS on the wafer (Con and Cui, 2013 ; Lee et al, 2019 ) and (2) by avoiding any horizontal movement of the PDMS microstructure on the wafer and CMOS surface during the transfer. Diluting PDMS in a solvent enables spincoating of a very thin layer of PDMS at feasible rotation speeds.…”
Section: Discussionmentioning
confidence: 99%
“…Spin coating is one of the most used methods in academic studies, as well as in industry, due to its capability for mass production at cheaper costs [ 95 , 96 , 97 , 98 ]. It is also easier to perform as it only requires a few drops of solution.…”
Section: Spin Coating Methodsmentioning
confidence: 99%