2011
DOI: 10.1109/jmems.2011.2163301
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A Modular Heat-Shrink-Packaged Check Valve With High Pressure Shutoff

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Cited by 5 publications
(6 citation statements)
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“…The four-part MEMS check valve (Lo and Meng 2011) consisted of a valve seat, pressure limiter, and spacer plate made of SU-8 2100 (MicroChem, Newton, MA), and an s-shaped arm valve plate made from MDX-4-4210 (10:1 base-to-curing agent ratio, Dow Corning, Midland, MI). The components were aligned and held in a custom fixture and covered with 1.3:1 shrink ratio fluorinated ethylene propylene (FEP) heat-shrink tubing (22G, Zeus Industrial Products Inc., Orangeburg, SC).…”
Section: Methodsmentioning
confidence: 99%
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“…The four-part MEMS check valve (Lo and Meng 2011) consisted of a valve seat, pressure limiter, and spacer plate made of SU-8 2100 (MicroChem, Newton, MA), and an s-shaped arm valve plate made from MDX-4-4210 (10:1 base-to-curing agent ratio, Dow Corning, Midland, MI). The components were aligned and held in a custom fixture and covered with 1.3:1 shrink ratio fluorinated ethylene propylene (FEP) heat-shrink tubing (22G, Zeus Industrial Products Inc., Orangeburg, SC).…”
Section: Methodsmentioning
confidence: 99%
“…Flow rate was measured in a calibrated micropipet (Accu-Fill 90, Becton, Dickinson and Company, NJ) attached to the valve outlet. The valve was kept dry prior to the first application of pressurized water, but was submerged in water before the second run to prevent stiction, which was observed previously and described in (Lo and Meng 2011). …”
Section: Methodsmentioning
confidence: 99%
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“…Drug delivery was controlled either by manually applied pressure [94-96] or driven by electrolysis-actuated pumping [67, 68, 97-99]. The pressure-responsive one-way valve opened only under dosing conditions (elevated reservoir pressure) and prevented back flow of fluids into the device [94-96, 100, 101]. Low power operation allows wireless activation of drug delivery (shown in vitro) [23].…”
Section: Electrolysis-based Drug Delivery Micropumpsmentioning
confidence: 99%